| 氧化物薄膜的离子束溅射沉积 |
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| 引用本文： | 汤雪飞,范正修.氧化物薄膜的离子束溅射沉积[J].光学学报,1992,12(5):73-475. |
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| 作者姓名： | 汤雪飞 范正修 |
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| 作者单位： | 中国科学院上海光学精密机械研究所 上海201800
(汤雪飞，范正修)，中国科学院上海光学精密机械研究所 上海201800(王之江) |
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| 摘 要： | 用离子束溅射沉积的方法制备的TiO_2、ZrO_2薄膜的光吸收损耗明显降低,对其折射率、光吸收和抗激光损伤阈值等特性进行了分析.
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| 关 键 词： | 离子束 溅射沉积 薄膜 光学特性 |
| 收稿时间： | 1991/4/24 |
Ion-beam sputtering deposition of oxide coatings |
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| TANG XUEFE,FAN ZHENGXIU AND WANG ZHUJIANG.Ion-beam sputtering deposition of oxide coatings[J].Acta Optica Sinica,1992,12(5):73-475. |
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| Authors: | TANG XUEFE FAN ZHENGXIU AND WANG ZHUJIANG |
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| Abstract: | TiO2 and ZrO2 thin films were deposited by ion-beam sputtering. Their refractive indices, optical absorption and laser-induced damage thresholds are investigated. The optical absorption of the coatings are decreased obviously. |
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| Keywords: | ion beam sputtering deposition thin film optical properties |
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