大口径光学元件波前功率谱密度检测

波前功率谱密度（PSD）被用于评价惯性约束聚变激光驱动器光学元件在中频区域的波前误差。高功率固体激光装置对大口径光学元件波前质量的要求有别于传统光学系统，要求对波前误差进行较高空间频率的测量。探讨了大口径光学元件波前的高空间分辨率检测技术，采用大口径相移干涉仪作为波前检测仪器，通过傅里叶变换获得波前一维功率谱密度分布。对惯性约束聚变激光驱动器的典型光学元件进行了波前功率谱密度的的检测和分析。

Measurement of Wavefront Power Spectral Density of Large Optical Components

The optical components employed in high power density solid state laser for inertial confinement fusion (ICF) must be measured at full aperture to provide the higher resolution measurements necessary to detect mid spatial frequency errors in the wavefront. The use of Fourier analysis techniques to measure the wavefront power spectral density (PSD) in mid frequency domain is discussed. A large phase shifting Fizeau interferometer is used for the measurement. The phase wavefront detected by the interferometer is digitally processed to create one dimension wavefront PSD. The PSD of several optical components are shown.