| 30.4 nm波长SiC/Mg多层膜反射镜 |
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| 引用本文： | 朱京涛,张淑敏,王蓓,吴文娟,李存霞,徐垚,张众,王风丽,王占山,陈玲燕,周洪军,霍同林.30.4 nm波长SiC/Mg多层膜反射镜[J].光学学报,2007,27(4):35-738. |
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| 作者姓名： | 朱京涛 张淑敏 王蓓 吴文娟 李存霞 徐垚 张众 王风丽 王占山 陈玲燕 周洪军 霍同林 |
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| 作者单位： | 1. 同济大学物理系精密光学工程与技术研究所,上海,200092
2. 中国科技大学国家同步辐射实验室,合肥,230029 |
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| 基金项目： | 国家自然科学基金(60378021,10675092)，教育部新世纪人才基金(NCET-04-0376)，同济大学理科发展基金 |
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| 摘 要： | 波长30.4 nm的He-II谱线是极紫外天文观测中最重要的谱线之一,空间极紫外太阳观测光学系统需要采用多层膜作为反射元件。为此研究了SiC/Mg、B4C/Mg、C/Mg、C/Al、Mo/Si、B4C/Si、SiC/Si、C/Si、Sc/Si等材料组合的多层膜在该波长处的反射性能。基于反射率最大与多层膜带宽最小的设计优化原则,选取了SiC/Mg作为膜系材料。采用直流磁控溅射技术制备了SiC/Mg多层膜,用X射线衍射仪测量了多层膜的周期厚度,用国家同步辐射计量站的反射率计测量了多层膜的反射率,在入射角12°时,实测30.4 nm处的反射率为38.0%。
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| 关 键 词： | 薄膜光学 极紫外 多层膜 磁控溅射 同步辐射 太阳He-Ⅱ谱线 |
| 文章编号： | 0253-2239（2007）04-0735-4 |
| 收稿时间： | 2006/8/8 |
| 修稿时间： | 2006-08-08 |
SiC/Mg Multilayer Film Reflective Mirror at 30.4 nm |
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| Zhu Jingtao,Zhang Shumin,Wang Bei,Wu Wenjuan,Li Cunxia,Xu Yao,Zhang Zhong,Wang Fengli,Wang Zhanshan,Chen Lingyan,Zhou Hongjun,Huo Tonglin.SiC/Mg Multilayer Film Reflective Mirror at 30.4 nm[J].Acta Optica Sinica,2007,27(4):35-738. |
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| Authors: | Zhu Jingtao Zhang Shumin Wang Bei Wu Wenjuan Li Cunxia Xu Yao Zhang Zhong Wang Fengli Wang Zhanshan Chen Lingyan Zhou Hongjun Huo Tonglin |
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| Institution: | 1. Institute of Precision Optical Engineering and Technology, Tongji University, Shanghai 200092 ; 2. Nantional Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029 |
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| Abstract: | The He-Ⅱ spectrum at the wavelength of 30.4 nm is a key spectrum in extreme ultraviolet astronomic observation, and multilayer film reflective mirror are usually adapted in the observation. The reflection at the wavelength of 30.4 nm of the multilayer films composed of SiC/Mg, B4C/Mg, C/Mg, C/Al, Mo/Si, B4C/SI, SiC/Si, C/Si, Sc/Si is studied. Based on the optimization of largest reflectivity and narrowest width for the multilayer film mirror, SiC/Mg multilayer is selected as the film material, SiC/Mg multilayer films are fabricated by using magnetron sputtering. The periodical thickness of the SiC/Mg multilayer film is measured by X-ray diffractometer, and the reflectivity was measured by the reflectometer in synchrotron radiation laboratory. At incidence angle of 12°, the reflectivity of 38.0% is obtained at the wavelength of 30.4 nm. |
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| Keywords: | thin film optics extreme ultraviolet multilayer film magnetron sputtering synchrotron radiation solar He-Ⅱ spectrum |
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