基于Harvey-Shack表面散射理论的光学误差测量

基于散射理论,不同频段的光学表面制造误差会对光学性能产生不同的影响,而常用的光学设计软件一般没有考虑。为此利用小波变换对误差进行了频段分割;然后基于Harvey-Shack表面散射理论,从频段误差的角度对光学表面的光学性能进行了评价,同时基于小波变换的特点,当光学性能不满足要求时,找到了需重点控制的频段误差在光学表面发生的区域,从而对下一步的加工进行指导。最后以一块口径500 mm的大镜实测数据及设计要求"在0.33 mrad内环绕能量大于70%"进行了实验验证。结果表明,利用此方法能有效的建立"表面频段误差光学评价光学加工"三者之间的联系。

Measure of Optical Errors Based on Harvey-Shack Surface Scattering Theory

Scattering effects from optical fabrication errors of different frequency-segment limit the optical performance. But there lacks appropriate optical design software to account for these effects. In order to solve this problem and guide fabrication, Wavelet transform is used to separate errors; and then Harvey-Shack surface scatter theory is used to specify optical surface. Because of wavelet-transform's character, the corresponding region of crucial frequency segment error is also found when the optical performance cannot satisfy demand, thereby guiding fabrication. Finally, there is an experimental validation via measurement data of an aperture =500 mm mirror and design demand “the enclosed energy requirement of 70% in a 0.33 mrad enclosed region”. The experimental results show the method can set up a direct relation between frequency-segment errors, optical specification and optical fabrication effectively.