| 角位置敏感探测器及其有限元分析 |
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| 引用本文： | 丁海峰,黄梅珍,李振庆.角位置敏感探测器及其有限元分析[J].光学学报,2007,27(11):2064-2069. |
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| 作者姓名： | 丁海峰 黄梅珍 李振庆 |
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| 作者单位： | 上海交通大学,物理系光学工程研究所,上海,200240 |
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| 摘 要： | 介绍了一种基于半导体横向光电效应的角位置敏感探测器的结构设计,采用有限元方法对该角位置敏感探测器的输出特性:线性度、角度精度及响应灵敏度,进行了模拟计算,在较大的角度范围内(如90°)进行测量,得到了很高的线性精度(小于0.04%)和角度测量精度(约20″)。分析讨论了材料电学参量及模型结构参量等因素对其测角精度的影响,通过优化选取材料及结构参量,可以使线性度(小于0.01%)及精度(小于1″)更高,能够用于高精度的角度测量。
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| 关 键 词： | 角位置敏感探测器 结构设计 有限元 输出特性 |
| 文章编号： | 0253-2239（2007）11-2064-6 |
| 收稿时间： | 2006/12/27 |
| 修稿时间： | 2006-12-27 |
Angular Position Sensitive Detector and Finite-Element Analysis |
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| Ding Haifeng,Huang Meizhen,Li Zhenqing.Angular Position Sensitive Detector and Finite-Element Analysis[J].Acta Optica Sinica,2007,27(11):2064-2069. |
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| Authors: | Ding Haifeng Huang Meizhen Li Zhenqing |
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| Institution: | Institute of Optical Engineering, Department of Physics, Shanghai Jiaotong University, Shanghai 200240 |
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| Abstract: | The structure design of angular position sensitive detector (APD) utilizing semiconductor′s lateral photo electric effect is introduced. A finite-element method (FEM) is adopted to analyze and calculate the output characteristics of APD, such as linearity, angular precision and response sensitivity. Based on FEM simulation, this APD design can achieve high linearity (<0.04%) and high precision (~20″) for angular measurement in the range of 90°. At last, the factors that influence the precision of measuring angle including electric parameters of material and model structure parameters, such as resistance and electrode, are analyzed. By optimizing material and structure, the APD can achieve higher linearity (<0.01%) and angle resolution (<1″) and be used in angular measurement with high resolution. |
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| Keywords: | angular position sensitive detector structure design finite-element method output characteristic |
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