| 30.4nm极紫外成像探测器的实验研究 |
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| 引用本文： | 朱香平,赵宝升,刘永安,缪震华,张兴华,邹玮.30.4nm极紫外成像探测器的实验研究[J].光学学报,2008,28(10):1925-1929. |
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| 作者姓名： | 朱香平 赵宝升 刘永安 缪震华 张兴华 邹玮 |
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| 作者单位： | 1. 中国科学院西安光学精密机械研究所瞬态光学与光子技术国家重点实验室,陕西,西安,710119
2. 中国科学院西安光学精密机械研究所瞬态光学与光子技术国家重点实验室,陕西,西安,710119;中国科学院研究生院,北京,100039 |
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| 基金项目： | 中国科学院知识创新工程项目 |
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| 摘 要： | 报导了最新研制的30.4 nm极紫外成像探测器的实验研究结果.该探测器采用了楔条形阳极(WSA)、高增益v型级联微通道板组件、低噪声电子读出系统等先进技术,利用单光子计数成像技术在实验审成功获得了模拟图像.搭建了相应的实验系统,对探测器成像的线性度、空间分辨率、暗计数等性能进行了实验研究.结果表明,该探测器具有φ45 nm的有效面积,空间分辨率优于100μm,暗计数率低0.4 count/(cm2·s]、成像线性度好、结构简单等优点.
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| 关 键 词： | 探测器 紫外探测 30.4nm极紫外 单光子计数成像 微通道板 楔条形阳极探测器 |
| 收稿时间： | 2008/1/7 |
Experimental Study on 30.4 nm Extreme Ultaviolet Imaging Detector |
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| Zhu Xiangping,Zhao Baosheng,Liu Yongan,Miao Zhenhua,Zhang Xinghua,Zou Wei.Experimental Study on 30.4 nm Extreme Ultaviolet Imaging Detector[J].Acta Optica Sinica,2008,28(10):1925-1929. |
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| Authors: | Zhu Xiangping Zhao Baosheng Liu Yongan Miao Zhenhua Zhang Xinghua Zou Wei |
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| Institution: | Zhu Xiangping1 Zhao Baosheng1 Liu Yongan1,2 Miao Zhenhua1,2Zhang Xinghua1,2 Zou Wei11State Key Laboratory of Transient Optics , Photonics,Xi'an Institute of Optics , Precision Mechanics,Chinese Academy of Sciences,Xi'an,Shaanxi 710119,China2 Graduate University of Chinese Academy of Sciences,Beijing 100039,China |
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| Abstract: | The experimental result of the newly developed 30.4 nm extreme ultraviolet imaging detector was reported in detail,which adopted wedge strip and zigzag anode(WSA),V-stack high-gain microchannel plate(MCP) components,low-noise electronic readout system,and other advanced techniques.Simulated images were obtained successfully by using the single-photon counting imaging technique in the laboratory.The experimental setup system was established and the detector imaging linearity,resolution,the dark count rates e... |
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| Keywords: | detectors ultraviolet detection 30 4 nm exteme ultraviolet single-photon counting imaging microchanel plate (MCP) wedge strip and zigzag anode (WSA) detector |
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