振动对面形测量误差的影响分析

振动会使高精度面形测量产生误差。建立了振动对干涉测量面形的误差模型，应用13步移相算法分析了在振幅为63 nm时的误差情况。分析结果表明，当面形测量误差的敏感频率为12 Hz时，振动引起的面形均方根(RMS)误差约为12 nm。通过实验进行了验证，仿真分析结果和实验结果基本相同。实验分析了在12 Hz时，振幅为5~63 nm时，对应的测量面形RMS误差为1~7.1 nm，振幅和RMS误差线性增大。为不同振动频率和振幅引起的面形RMS的误差分析和高精度面形测量的振动环境控制提供了一定的参考。

Analysis of Vibration Effect to Surface Figure Measurement

Vibration introduces error to high accuracy surface figure measurement. The vibration error model of the surface figure measurement is established by interferometry. When the vibration amplitude is 63 nm, the sensitive vibration frequency of the surface figure measurement is 12 Hz, and the surface figure root mean square (RMS) error is about 12 nm caused by vibration through using the thirteen-step algorithm. The simulation result and the experimental result are almost the same. According to the experimental analyses, the RMS error of surface figure varies from 1 nm to 7.1 nm, when the vibration frequency is 12 Hz and the amplitude varies from 5 nm to 63 nm, and the surface figure RMS error increases linearly with the vibration amplitude. It can provide a certain reference for the environment control of vibration when measuring high accuracy surface figure through analyzing the surface figure error at different vibration frequencies and amplitudes.