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准相位型光子筛设计
引用本文:唐燕,胡松,朱江平,何渝.准相位型光子筛设计[J].光学学报,2012,32(10):1022007-253.
作者姓名:唐燕  胡松  朱江平  何渝
作者单位:唐燕:中国科学院光电技术研究所微细加工光学技术国家重点实验室, 四川 成都 610209
胡松:中国科学院光电技术研究所微细加工光学技术国家重点实验室, 四川 成都 610209
朱江平:中国科学院光电技术研究所微细加工光学技术国家重点实验室, 四川 成都 610209
何渝:中国科学院光电技术研究所微细加工光学技术国家重点实验室, 四川 成都 610209
基金项目:国家自然科学基金(61076099,60906049)资助课题。
摘    要:提出了一种准相位型光子筛。该准相位型光子筛通过改变暗环上小孔直径与带宽的比值,对焦点处的相位分布进行调制,使通过亮环和暗环上小孔的光波在焦点处发生相长干涉,生成聚焦光斑。该准相位型光子筛无需对基底进行特殊处理,即可完成相位型光子筛的制作,降低了加工难度。和普通振幅型光子筛相比,在相同最小加工尺寸的条件下,准相位型光子筛具有较大的数值孔径,可降低聚焦光斑尺寸。并且,和多区光子筛相比,在同样的最小加工尺寸及数值孔径的条件下,准相位型光子筛光斑尺寸及质量均优于对方。为大数值孔径光子筛设计提供了一种新的设计方法。

关 键 词:衍射  光子筛  相位  聚焦特性
收稿时间:2012/3/31

Design of Quasi-Phase Photon Sieve
Tang Yan Hu Song Zhu Jiangping He Yu.Design of Quasi-Phase Photon Sieve[J].Acta Optica Sinica,2012,32(10):1022007-253.
Authors:Tang Yan Hu Song Zhu Jiangping He Yu
Institution:Tang Yan Hu Song Zhu Jiangping He Yu(State Key Laboratory of Optical Technologies for Microfabrication,Institute of Optics and Electronics, Chinese Academy of Sciences,Chengdu,Sichuan 610209,China)
Abstract:A design of quasi-phase photon sieve is proposed. The pinholes of the quasi-phase photon sieve distributed in black and white plate zones have different ratios of diameter to zone width to obtain π phase shift, so that all of them have positive contribution to the field value at the desired focal point. The quasi-phase photon sieve does not need to process the rest and reduce the technology difficult of traditional phase photon sieve. Compared with the traditional photon sieve, the quasi-phase one with the same specific minimum feature size has bigger numerical aperture and smaller focal spot size. Furthermore, compared with the multi-region photon sieve, with the same specific minimum feature size and numerical aperture, the quasi-phase photon sieve has smaller focal spot size and better focus characteristics. The quasi-phase photon sieve provids a new way for the design of photon seieve with high humerical aperture.
Keywords:diffraction  photon sieve  phase  focus characteristics
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