| 液晶实时掩膜技术制作连续微光学元件 |
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| 引用本文： | 彭钦军,郭永康,陈波,刘世杰,曾阳素.液晶实时掩膜技术制作连续微光学元件[J].光学学报,2003,23(2):20-224. |
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| 作者姓名： | 彭钦军 郭永康 陈波 刘世杰 曾阳素 |
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| 作者单位： | 四川大学物理系信息光学研究中心,成都,610064 |
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| 基金项目： | 国家自然科学基金 ( 6 99780 14)资助课题。 |
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| 摘 要： | 提出制作连续微光学元件的一种新技术———液晶实时掩膜技术 ,阐述了其基本原理和制作方法。基于部分相干光成像理论 ,采用计算机模拟了用实时掩膜制作微透镜和微轴锥镜阵列的过程。同时建立了实验装置进行实验 ,用全色银盐干板 (Kodak 131)通过酶刻蚀得到口径为 118.7μm ,深为 1.32 2 μm的 5 6× 48的轴锥镜的列阵。
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| 关 键 词： | 制作 应用光学 实时掩膜 液晶显示器件 连续微光学元件 光刻 |
| 收稿时间： | 2002/1/22 |
LCD Real-Time Mask Technique for Fabrication of Continuous Microoptical Elements |
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| Peng Qinjun,Guo Yongkang,Chen Bo,Liu Shijie,Zeng Yangsu.LCD Real-Time Mask Technique for Fabrication of Continuous Microoptical Elements[J].Acta Optica Sinica,2003,23(2):20-224. |
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| Authors: | Peng Qinjun Guo Yongkang Chen Bo Liu Shijie Zeng Yangsu |
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| Abstract: | new technique for fabrication of continuous microoptical elements by using LCD (liquid crystal display) real-time mask is proposed, and its principle and design method are expatiated. Based on partial coherent imaging theory, the process to fabricate the micro-axicon and the microlens has been simulated. The experimental setup for LCD real-time mask technique was built by using the color LCD in authors′ laboratory. and the micro-axicon array has been fabricated. The 3|dimensional surface relief structure was shaped in the pan chromatic silver-halide sensitized gelatin (Kodak-131) with trypsinase etching. The caliber of axicon is 118.7 μm, and the etching depth is 1.322 μm |
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| Keywords: | applied optics real-time mask liquid crystal display (LCD) continuous microoptical elements photolithography |
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