激光调频光纤位移传感器多路复用技术的研究

叙述了运用半导体激光器连续波调频外差干涉和频域多路复用原理，研究了光纤位移传感器多路复用技术。已研制成的分频与分幅相结合四路复用光纤位移传感器，可同时进行对多点、多维位移和多种物理量的测量，各路位移测量范围大于１ｍｍ，测量精度优于０．１μｍ及位移分辨率为０．０１μｍ。

Multiplexing Technique of Optical Fiber Displacement Sensor Based on Heterodyne Interference with Frequency-Modulated Semiconductor Laser

In this paper, the multiplexing technique of optical fiber displacement sensor based on the principles of frequency-modulation continuous wave and heterodyne interference and frequency-division multiplexing is studied. A four-channel multiplexing optical fiber displanment sensors using the scheme of frequency-ampitude-division multiplexing is designed and fabricated. Many points or multi-dimension displacements or many physical parameters can be measured at the same time. The measurement accuracy of each channel is 0.1 μm and the measurement range is more than 1 mm. The hightest resolution of displacement is 0.01 μm.