ZnO薄膜的光学性质研究 |
| |
引用本文: | 贺洪波,易葵.ZnO薄膜的光学性质研究[J].光学学报,1998,18(6):99-802. |
| |
作者姓名: | 贺洪波 易葵 |
| |
作者单位: | 中国科学院上海光学精密机械研究所 |
| |
摘 要: | 采用直流反应磁控溅射方法在玻璃基底上成功地淀积c轴取向性好的ZnO薄膜。经过优化计算,获得并分析了不同氧分压下制备的ZnO薄膜的折射率n和消光系数k的数值;同时得到了吸收光学带隙Eopt,用能带模型解释了Eopt的变化规律。
|
关 键 词: | 薄膜 光学性质 吸收谱 光学带隙 氧化锌薄膜 |
收稿时间: | 1997/7/10 |
Optical Properties of ZnO Thin Films |
| |
Abstract: | Zinc oxide films of good c—axis preferred orientation have been deposited onto glass substrates using direct—current reactive magnetron sputtering. After optimizing calculation, analyses have been made of refractive index n and extinction coefficient of ZnO thin films prepared at different Ar/O2 proportions. Moreover, absorption spectrum and optical band—gap Eopt are derived and the variation of Eopt is explained by all energy band model. |
| |
Keywords: | ZnO thin films optical properties absorption spectrum optical band—gap |
本文献已被 CNKI 维普 等数据库收录! |