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Single-mode optical waveguides fabricated in LiNbO3 by multienergy C implantations |
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| Authors: | Chuan-Lei Jia Ke-Ming Wang Fei Lu Xue-Lin Wang Yi Jiang Lei Wang Yang Jiao Jian-Hua Zhang Xi-Feng Qin Ding-Yu Shen Hong-Ji Ma Rui Nie |
| Institution: | aDepartment of Physics, Shandong University, Jinan, Shandong 250100, PR China;bSchool of Information Science and Engineering, Shandong University, Jinan 250100, PR China;cKey Laboratory of Heavy Ion Physics, Ministry of Education, Peking University, Beijing 100871, PR China |
| Abstract: | Single-mode waveguides in LiNbO3 are demonstrated by use of prism coupling method. The waveguides are fabricated by three different energies and single energy C2+ implantations at the equal total doses, respectively. Dark modes and propagation loss are measured by use of prism coupling and moving fiber methods, respectively. Damages produced by implantation are measured by RBS/channeling technique. The waveguide structures are investigated in two different implantation cases. The results of analysis indicate that the heavy ion-implanted waveguides are still defined by synergetic characteristics from both the raised-index region and the low-index barrier. The broadened barrier from multienergy implantation is demonstrated to play a significant role in reducing propagation loss. |
| Keywords: | Waveguide Ion implantation Propagation loss |
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