Influence of growth and anneal conditions on the surface roughness of L10 Fe50PdxPt50−x thin films |
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| Authors: | Xin Jiang Ruisheng LiuLi Gao Teya TopuriaStuart Parkin |
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| Institution: | Almaden Research Center, IBM Research, 650 Harry Road, San Jose, CA 95120, United States |
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| Abstract: | We deposit Fe50PdxPt50−x alloy thin films by magnetron sputtering onto a TiN seed layer. Chemically ordered L10 films are obtained which display large perpendicular magnetic anisotropy. We find that the surface roughness of the film depends strongly on the growth and anneal conditions as well as the Pd composition of the film. Smooth films are obtained by deposition above the chemical ordering temperature and by removing Pd from the alloy. |
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| Keywords: | L10 ordering FePdPt Perpendicular magnetic anisotropy Surface roughness |
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