声学微结构的微流控声场的改进与优化*

受限于加工工艺，目前多数的声表面波微流控芯片，主要依靠普通的直通道调节细胞流速,从而控制微球在通道中的排列。但其形成的声场通常无法满足低能量、多功能的微流控需要。本文在普通声表面波微流控芯片的基础上，分别在频域和时域内构建声学微结构，并改变微结构阵列中铜柱间距，模拟仿真了微流控芯片输出端的电势，发现其输出端电压得到了明显的改善。当输入电信号频率在0-30MHz时，输出端电势增加约0.25V；在0-1000ns内，输出端电势增加0.015V左右；进而可以探索开发性价比更高的声波微流控芯片，针对病理检测等所存在的问题进行分析优化，提出新的细胞分离等技术。

Improvement and optimization of microfluidic sound field based on acoustic microstructure

Most of the current SAW microfluidic chips rely on the normal straight-through channel to regulate the cell flow rate and thus control the arrangement of microspheres in the channel.However, the sound field formed by it usually cannot meet the needs of low-energy and multi-functional microfluidics.In this paper, we simulated the potential at the output of the microfluidic chip by constructing acoustic microstructures in the frequency domain and time domain based on the ordinary SAW microfluidic chip and changing the spacing of copper columns in the microstructure array, and found that the voltage at the output of the microfluidic chip was significantly improved.When the input electrical signal frequency is in 0-30MHz, the potential at the output end increases by about 0.25V; in 0-1000ns, the potential at the output end increases by about 0.015V; in turn, the development of a more cost-effective acoustic microfluidic chip can be explored to analyze and optimize the problems that exist for pathology detection, etc., and to propose new techniques for cell separation, etc.