| Zno-SiO2-Si结构中压电薄膜C轴取向等参数对声表面波的影响 |
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| 引用本文： | 邓明晰.Zno-SiO2-Si结构中压电薄膜C轴取向等参数对声表面波的影响[J].应用声学,1997,16(2):18-23. |
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| 作者姓名： | 邓明晰 |
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| 作者单位： | 重庆后勤工程学院物理教研室!重庆，630042 |
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| 摘 要： | 当ＺｎＯ－ＳｉＯ２－Ｓｉ结构中的ＺｎＯ薄膜Ｃ轴取向偏离基片法向时，将对声表面波传播速度，机电耦合系数等参量产生影响。本文对此问题进行了理论分析和数值计算；同时还讨论了本结构中影响声表面波束偏的一些参数。
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| 关 键 词： | C轴取向 声表面波 束偏 压电薄膜 |
The effects of the c-axis orientation of the ZnO film and other parameters in ZnO-SiO2-Si layered structure on SAW |
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| Deng Mingxi.The effects of the c-axis orientation of the ZnO film and other parameters in ZnO-SiO2-Si layered structure on SAW[J].Applied Acoustics,1997,16(2):18-23. |
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| Authors: | Deng Mingxi |
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| Institution: | Logistical Engineering University , Chongqing , 630042 |
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| Abstract: | The important parameters of SAW devices, the SAW velocity and the me chanico-electrical coupling coefficient, will be affected by the c-axis orientation of ZnO film in a ZnO-SiO2-Si layered structure. In the present paper, the problem is studied the oretically. Moreover, beamsteering of SAW is also investigated for the layered structure. |
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| Keywords: | ZnO film C-axis orientation Surface acoustic wave Beamsteering |
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