超声驻波场粒子二维运动控制机理与模型研究*

为了将正交超声驻波技术用于多晶硅陷光结构网格化微加工,以达到均匀加工的目的,本文从理论、模拟和实验等方面研究了粒子由无规则排列到超声作用后形成二维网格状排列的运动过程,网格化控制机理,并建立了二维运动方程。计算机仿真结果与实验结果一致,表明应用超声驻波进行网格化微纳加工设想是可行的。

Study on particles motion controlling and modeling based in two-dimensional ultrasonic standing waves

In order to achieve the uniform processing on the surface of multi-crystalline silicon (mc-Si) solar cell, this paper presents orthogonal ultrasonic standing wave to manufacture regular morphology on the surface of mc-Si to improve the light trapping. The theory of particle motion formatting the grid-like arrangement in the field of ultrasonic standing wave was studied, and a two-dimensional model of motion was established. The process of particle motion was programmed and simulated. A experiment has been designed to test the efficiency of particle motion controlling and modeling, and the result illustrates that the application of ultrasonic standing wave grid micromachining is feasible to control particle motion.