| 利用准谐频叉指换能器实现GHz高频SAW滤波器 |
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| 引用本文： | 翟凡,章德,李勇,谢中华.利用准谐频叉指换能器实现GHz高频SAW滤波器[J].应用声学,1999,18(2):6-10. |
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| 作者姓名： | 翟凡 章德 李勇 谢中华 |
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| 作者单位： | 1. 南京大学声学研究所南京 210093
2. 南京电子器件研究所南京 210016 |
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| 摘 要： | 本文利用准谐频设计方法，在常规光刻工艺水平上，成功地实现了ＧＨＺ级声表面波（ＳＡＷ）器件，准谐频叉指换能器（ＱＨＩＤＴ）的优点为：其指条宽与指间隙可以比一般的单指换能器宽，克服了单指换能器内指间的多次反射，并且又较好地解决了普通谐频叉指换能器基频抑制不好的缺点，本文给出了制作在ＳＴ石英基片上，工作频率１１２８ＭＨＺ的声表面波滤波器的实验结果。
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| 关 键 词： | 声表面波 滤波器 准谐频 GHz SAW |
Implementation of GHz SAW filters using quasi-harmonic interdigital transducers |
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| Zhai Fan,Zhang De,Li Yong and Xie Zhonghua.Implementation of GHz SAW filters using quasi-harmonic interdigital transducers[J].Applied Acoustics,1999,18(2):6-10. |
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| Authors: | Zhai Fan Zhang De Li Yong and Xie Zhonghua |
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| Institution: | Institute of Acoustics, Nanjing University, Naming 210093;Institute of Acoustics, Nanjing University, Naming 210093;Nanjing Electronic Devices institute, Naming 210016;Nanjing Electronic Devices institute, Naming 210016 |
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| Abstract: | In this paper, GHz SAW filters are implemented using the quasi harmonic interdigital transducers (QHIDTs). The advantages of QHIDT are that the width of electrodes in QHIDT is wider than that of normal IDT with single fingers, and therefore the practical GHz SAW filters have been successfully implemented using conventional manufacturing processes. Furthermore, in QHIDT, multi-reflection between fingers can be eliminated and the fundamental frequency signal can be suppressed as well. The simulation of QHIDT is described in the paper, and the experimental results of a SAW filter working at 1128 MHz, fabricated on a ST Quartz substrate, are also shown in this paper. |
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| Keywords: | SAW filters Quasi harmonic GHz |
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