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超小型声表面波谐振器
引用本文:仇钢,章德,何小悦.超小型声表面波谐振器[J].应用声学,2003,22(6):1-5.
作者姓名:仇钢  章德  何小悦
作者单位:南京大学声学研究所近代声学国家重点实验室,南京,210093
摘    要:传统声表面波谐振器中的指条反射阵占据了器件的大部分尺寸。由于剪切横波(SH wave)在材料基片的自由端面反射时不产生模式转换,因此可望利用自由端面来代替SH型声表面波谐振器中的指条反射阵,实现超小型低损耗的新型声表面波谐振器。本文首先用COM理论对新结构的谐振器进行了讨论,并且在实验上实现了120MHz至440MHz的几个单端谐振器(ST36°石英基片),其插入损耗从0.87dB至1.29dB,面积缩小到传统谐振器的50%至25%。

关 键 词:声表面波谐振器  指条反射阵  剪切横波  COM理论  滤波器  通信系统
修稿时间:2002年10月31

Super-small SAW resonators
QIU Gang,ZHANG De and HE Xiaoyue.Super-small SAW resonators[J].Applied Acoustics,2003,22(6):1-5.
Authors:QIU Gang  ZHANG De and HE Xiaoyue
Institution:Institute of Acoustics, State Key Laboratory of Modern Acoustics, Nanjing University, Nanjing 210093;Institute of Acoustics, State Key Laboratory of Modern Acoustics, Nanjing University, Nanjing 210093;Institute of Acoustics, State Key Laboratory of Modern Acoustics, Nanjing University, Nanjing 210093
Abstract:The reflective arrays occupy a large amount of areas of a conventional surface acoustic wave (SAW) resonator. Due to lack of mode conversion on the reflection of a shear horizontal wave (SH wave) at the free edges of the substrate, it is possible to replace reflective arrays by free edges in the SH type SAW resonators, and to realize low-loss resonators with super small sizes. In this paper, the properties of SH-SAW resonators are analyzed with the COM theory and some one-port resonators on ST-36o quartz substrate from 120MHz to 440MHz are fabricated , the insertion loss being about from 0.87dB to 1.29dB. Compared with conventional SAW resonators, these SH type SAW devices achieve both in the low insertion loss and in reduction in size by 50% to 25%.
Keywords:Resonators  SH-SAW  Edge reflection
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