| 硅微ZnO压电薄膜传声器的研制 |
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| 引用本文： | 杨楚威,黄歆,李俊红,解述,魏建辉,马军,汪承灏.硅微ZnO压电薄膜传声器的研制[J].应用声学,2003,22(5):1-4. |
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| 作者姓名： | 杨楚威 黄歆 李俊红 解述 魏建辉 马军 汪承灏 |
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| 作者单位： | 中国科学院声学研究所,北京,100080 |
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| 摘 要： | 本文介绍了一种利用ZnO压电薄膜为换能器的硅微压电薄膜传声器的制备,并且对微机械加工工艺过程进行了较为详细的描述。本文对传声器的部分结构进行改进,与通常设计相比较大幅提高了传声器的性能,1000Hz基准频率的灵敏度达到-85dB(相对于1V/Pa),500Hz到10000Hz的频率响应的平坦度在±3dB范围内。
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| 关 键 词： | 硅微压电薄膜传声器 换能器 ZnO 微机械加工工艺 性能 频率 灵敏度 平坦度 微机电系统 |
| 修稿时间： | 2002年11月26 |
Silicon based ZnO piezoelectric film micromachined microphone |
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| YANG Chuwei,HUANG Xin,LI Junhong,XIE Shu,WEI Jianhui,MA Jun and WANG Chenghao.Silicon based ZnO piezoelectric film micromachined microphone[J].Applied Acoustics,2003,22(5):1-4. |
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| Authors: | YANG Chuwei HUANG Xin LI Junhong XIE Shu WEI Jianhui MA Jun and WANG Chenghao |
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| Institution: | Institute of Acoustics, Chinese Academy of Science, Beijing 100080;Institute of Acoustics, Chinese Academy of Science, Beijing 100080;Institute of Acoustics, Chinese Academy of Science, Beijing 100080;Institute of Acoustics, Chinese Academy of Science, Beijing 100080;Institute of Acoustics, Chinese Academy of Science, Beijing 100080;Institute of Acoustics, Chinese Academy of Science, Beijing 100080;Institute of Acoustics, Chinese Academy of Science, Beijing 100080 |
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| Abstract: | This paper presents the fabrication of a silicon based ZnO piezoelectric film microphone. Micromachining techniques to fabricate the device are described in detail. The structure of this microphone has been modified from our earlier version one, the performance of the device is improved. The sensitivity at the standard frequency (1000Hz) is -85dB (ref. IV/Pa). The flatness of its frequency response from 500Hz to 10000Hz is ±3dB. |
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| Keywords: | ZnO Silicon microphone Piezoelectric film MEMS |
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