X荧光能谱分析中探测器响应函数建立方法

在X荧光能谱测量及分析过程中，通过建立探测器响应函数，可以实现对X荧光能谱中的全能峰峰形描述，有助于提高X荧光能谱分析速度、准确度和自动化程度。在X荧光能谱测量中，针对半导体探测器建立响应函数模型的理论与建模技术，文中对三种典型探测器响应函数建模方法，以及全能峰标准差、法诺因子等关键参数的求取进行了论述，并对已有研究进行了总结和比较。最后，对X荧光能谱测量中探测器响应函数建模方法给出了建议。

Methods of Detector Response Function Establishment in X-Ray Fluorescence Spectra Analysis

During the measurement and analysis process of X-ray fluorescence spectra, it is very helpful to improve the analyze speed, accuracy and automaticity of X-ray fluorescence spectra analysis by establishing detector response function(DRF), which represents the shape of full energy peak and can provide former basic data for subsequent X-ray analysis technique. For the theory and model of semiconductor DRF in X-ray energy spectrum measurements, methods of three typical detector response function model establishment, key parameters of full energy peak standard deviation and Fano factor calculation, etc. are discussed, and meanwhile, the summarization and contrast of existing studies are shown in this paper. Finally, the suggestion for modeling methods of DRF in X-ray fluorescence spectra measurements is provided.