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| 一种用于辉光放电光谱深度分析的激光实时测量新方法 | |
| 作者姓名： | Wan ZZ Li XJ Wang YQ Shi N Sun RX |
| 作者单位： | 1. 钢铁研究总院,国家钢铁材料测试中心,北京100081 2. 河北大学电子信息工程学院,河北保定,071002 3. 北京航空航天大学软件学院,北京,100191 |
| 基金项目： | 国家科技部科学仪器设备升级改造专项课题(JG-2002-9)资助 |
| 摘 要： | 辉光放电原子发射光谱仪可用于物质表面化学成分随深度分布的分析,在镀层分析、金属材料检验等领域有着广泛的应用。文章介绍了辉光深度分析的传统方法和局限性以及实时深度测量技术的近期研究,提出了一种用于辉光放电光谱深度分析的激光实时测量新方法。文章采用激光位移传感器和根据激光测量方法设计的辉光放电光源构成实时深度测量系统,详细阐述了系统的设计方案和技术原理。系统的设计结构能够实现在辉光光谱分析的同时进行激光实时溅射深度的测量。通过实验验证和分析了激光实时测量样品溅射深度过程中产生的光源位移现象。采用双激光器实时深度测量系统对锌合金标准样品进行了溅射深度的实时测量,给出了实时深度测量曲线。通过将溅射面测量曲线与参考面曲线进行叠加,得到了样品溅射坑深度的实际值,与Dektak8型表面形貌仪测量结果一致。 |
| 关 键 词： | 辉光放电原子发射光谱仪 深度轮廓分析 激光测量 实时深度测量 辉光放电 镀层 |
A real-time determination method with laser measurement for depth profile analysis of GD-OES |
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| Wan ZZ,Li XJ,Wang YQ,Shi N,Sun RX.A real-time determination method with laser measurement for depth profile analysis of GD-OES[J].Spectroscopy and Spectral Analysis,2011,31(9):2536-2541. | |
| Authors: | Wan Zhen-Zhen Li Xiao-Jia Wang Yong-Qing Shi Ning Sun Rong-Xia |
| Institution: | WAN Zhen-zhen1,LI Xiao-jia1,WANG Yong-qing2,SHI Ning3,SUN Rong-xia2 1.Central Iron & Steel Research Institute,National Testing Center of Iron & Steel,Beijing 100081,China 2.College of Electronic & Informational Engineering,Hebei University,Baoding 071002,China 3.College of Software,Beihang University,Beijing 100191,China |
| Abstract: | This paper presents the traditional methods of GD depth analysis method and also its limitations,and the earlier studies of real-time depth measurement technology.A new method of real-time depth determination by laser technology for GD-OES depth analysis is proposed.The real-time depth measurement system is composed of laser displacement sensor and new designed Grimm-type GD source based on laser measurement method,and the system design and technical principles are described in detail.Sputtering depth measu... |
| Keywords: | GD-OES Depth profile analysis Laser measurement Real-time depth determination Glow discharge Coating |
| 本文献已被 CNKI 万方数据 PubMed 等数据库收录！ | |