| MOEMS微镜面阵光谱仪的优化设计与实验 |
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| 作者姓名： | Mo XX Wen ZY Zhang ZH Guo YJ |
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| 作者单位： | 重庆大学新型微纳器件与系统技术国家重点学科实验室,光电技术及系统教育部重点实验室,重庆400044 |
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| 基金项目： | 三峡库区环境监测微系统国际科技合作项目(2007DFC00040); 国家中央高校基本科研业务专项资金项目(CDJXS10121146); 重庆市院士基金项目(CSTC2008BC3002); 国家自然科学基金项目(60708017)资助 |
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| 摘 要： | MOEMS(micro optical electronic mechanical system)微镜面阵光谱仪主要利用微镜面阵分时选通实现单个探测器光谱测量,具有无需斩波器实现脉冲信号输出,无需机械模板实现哈达吗调制,象元分辨率高,体积小,成本低等优点.针对MOEMS微镜面阵光谱仪设计中,狭缝尺寸与光通最之间的矛盾,...
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| 关 键 词： | 分辨率 微镜 光谱仪 MOEMS |
The optimizing design and experiment for a MOEMS micro-mirror spectrometer |
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| Mo XX,Wen ZY,Zhang ZH,Guo YJ.The optimizing design and experiment for a MOEMS micro-mirror spectrometer[J].Spectroscopy and Spectral Analysis,2011,31(12):3412-3416. |
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| Authors: | Mo Xiang-xia Wen Zhi-yu Zhang Zhi-hai Guo Yuan-jun |
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| Institution: | MO Xiang-xia,WEN Zhi-yu,ZHANG Zhi-hai,GUO Yuan-jun National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology,The Key Laboratory for Opto-Eletronic Technology and System under Ministry of Education,Chongqing University,Chongqing 400044 |
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| Abstract: | A MOEMS micro-mirror spectrometer,which uses micro-mirror as a light switch so that spectrum can be detected bya single detector,has the advantages of transforming DC into AC,applying Hadamard transform optics without additional tem-plate,high pixel resolution and low cost.In this spectrometer,the vital problem is the conflict between the scales of slit and thelight intensity.Hence,in order to improve the resolution of this spectrometer,the present paper gives the analysis of the neweffects caused by micro ... |
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| Keywords: | Resolution Micro mirror Spectrometer MOEMS |
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