| 反射干涉光谱法测量固体薄膜的光学常数和厚度 |
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| 引用本文： | 杨鹏,徐志凌,徐雷.反射干涉光谱法测量固体薄膜的光学常数和厚度[J].光谱学与光谱分析,2000,20(3):283-285. |
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| 作者姓名： | 杨鹏 徐志凌 徐雷 |
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| 作者单位： | 复旦大学物理系,三束材料改性国家重点实验室,200433,上海 |
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| 摘 要： | 本文报道一种简单的方法，从平原介质薄膜的反射干涉光谱来计算薄膜的光学常数和厚度。当一束光照射在基板上的介质膜上时，由于膜上下界面反射光的相干，会使反射光谱的曲线有一定的波动。我们对反射相干光谱进行理论分析，给出计算公式，从测量曲线中的实验值得出薄膜的光学常数ｎ、ｋ以及厚度等参数。此种方法简单可行，而且易于编程处理。
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| 关 键 词： | 薄膜 反射干涉光谱 折射率 厚度 |
A Reflection Interference Method for Determining Optical Constants and Thickness of a Thin Solid Film |
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| Peng YANG,Zhiling XU,Lei XU.A Reflection Interference Method for Determining Optical Constants and Thickness of a Thin Solid Film[J].Spectroscopy and Spectral Analysis,2000,20(3):283-285. |
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| Authors: | Peng YANG Zhiling XU Lei XU |
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| Institution: | Department of Physics, Fudan University, State Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, 200433 Shanghai. |
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| Abstract: | In this paper we report a simple method for dedu cing optical constants and thickness from the reflection interference spectrum o f a thin transparent film which is on a substrate of high reflection coefficient .When a light beam is incident on the surface of the film,the reflection light b eams at the front and rear faces are coherent.We calculated the optical constant s and thickness of the film from the reflection spectrum.This simple method make s a directly programmable calculation possible. |
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| Keywords: | Film Reflection interference spectrum Refrac tive index Thickness |
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