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显微激光诱导击穿光谱技术对低合金钢中Mn的定量检测
引用本文:王旭朝,郝中骐,郭连波,李祥友,曾晓雁,陆永枫.显微激光诱导击穿光谱技术对低合金钢中Mn的定量检测[J].光谱学与光谱分析,2017,37(4).
作者姓名:王旭朝  郝中骐  郭连波  李祥友  曾晓雁  陆永枫
作者单位:华中科技大学,武汉光电国家实验室(筹)激光与太赫兹功能实验室,湖北 武汉 430074
基金项目:国家重大科学仪器设备开发专项,中国博士后科学基金项目,中央高校基本科研业务费项目
摘    要:采用显微激光诱导击穿光谱技术对低合金钢标准样品进行定量分析,空间分辨率达到20μm,单脉冲检测极限(LoD)为0.10%。根据谱线强度和元素浓度的关系获得Mn元素的基本定标曲线,定标曲线的拟合度系数R~2为0.97,采用去一交互验证法预测了样品中Mn元素的浓度,七个样品的平均预测误差为12.91%,去一交互验证均方根误差为0.11%。采用内标法时定标曲线的拟合度系数R~2为0.99,七个样品的平均预测误差为7.25%,去一交互验证均方根误差为0.07%。实验结果表明显微激光诱导击穿光谱技术能有效应用于物质微区元素的高精度定性、定量分析。

关 键 词:激光诱导击穿光谱  显微光学  Mn  定量分析

Quantitative Analysis of Manganese in Low Alloy Steel with Micro-Laser-Induced Breakdown Spectroscopy
WANG Xu-zhao,HAO Zhong-qi,GUO Lian-bo,LI Xiang-you,ZENG Xiao-yan,LU Yong-feng.Quantitative Analysis of Manganese in Low Alloy Steel with Micro-Laser-Induced Breakdown Spectroscopy[J].Spectroscopy and Spectral Analysis,2017,37(4).
Authors:WANG Xu-zhao  HAO Zhong-qi  GUO Lian-bo  LI Xiang-you  ZENG Xiao-yan  LU Yong-feng
Abstract:Manganese in the low alloy steel was analyzed quantitatively using micro-laser-induced breakdown spectroscopy.The spatial resolution of 20 μm and the sing le pulse limit of detection of 0.10% were obtained.The calibration curve of M n was established with basic calibration method,with determination coeffic ien t (R2) of 0.97.The average relative error of Mn concentration predicti on on 7 samples is 12.91%,and the root-mean-square error of cross-validati on (RMSECV) is 0.11%.The R2 reaches 0.99 when using internal calibrati on method,as well as the average relative error of Mn concentration prediction on 7 samples and RMSECV were decreased to 7.25% and 0.07%,respectively.Th ese results show that MicroLIBS technique is an effective approach for material surfaces quantitative microanalysis.
Keywords:Laser-induced breakdown spectroscopy  Microsc ope optics  Mn  Quantitative analysis
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