FT－IR法测量高纯四氯化硅中的微量三氯氢硅

应用傅立叶交换红外光谱（ＦＴ－ＩＲ）技术和自制１０ｃｍ光程的不锈钢液体池，建立了光纤原料四氯化硅中微量三氯氢硅的定量分析方法。该法具有安全、简便、灵敏和重复性好的特点。

QUANTITATIVE DETERMINATION OF TRACE TRICHLOROSILANE IN HIGH PURITY SILICON TETRACHLORIDE USING FT-IR SPECTROSCOPY

The quantitative determination of trace trichlorosilane in high purity silicon tetrachloride by Fourier transform infrared spectroscopy was established. The analyses were performed with IFS85 FT-IR spectrometer and 10 cm path lengths stainless steel liquid cell with ZnS window. It was shown that the infrared cell made by our own is suitable for measuring corrosive reagents and that the use of the liquid cell of the type permits the detection of the trichlorosilane down to less than zero point six part per million by weight. Studies in which silicon tetrachloride samples change with time showed that silicon tetrachloride stored in tightly closed quartz container in dry atmosphere of less than 2%' relative humidity is stable. The method reported here is safe and simple. The accuracy of results is good enough for the application.