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对超声波作用下的化学浴沉积方法制备CdS薄膜的谱学分析
引用本文:储祥蔷,谢大弢,孟铁军,王莉芳,朱凤,向蓉,全胜文,赵夔,陈佳洱.对超声波作用下的化学浴沉积方法制备CdS薄膜的谱学分析[J].光谱学与光谱分析,2003,23(4):625-629.
作者姓名:储祥蔷  谢大弢  孟铁军  王莉芳  朱凤  向蓉  全胜文  赵夔  陈佳洱
作者单位:北京大学物理学院重离子物理研究所,北京,100871
基金项目:国家自然科学基金 (1 0 1 750 0 6)资助
摘    要:用化学浴沉积法制备了CdS薄膜 ,并研究了加超声波对CdS薄膜生长过程的影响。利用卢瑟福背散射 ,X 射线粉末衍射和扫描电子显微镜对薄膜的厚度、晶相和表面形貌进行了表征。结果表明施加超声波的作用能有效地改善薄膜的质量 ,制备出均匀、致密的有较好的晶体结构CdS薄膜。同时 ,通过时间的控制可以精确地控制薄膜在 5 0nm左右 ,以满足制备太阳能电池的特殊要求。

关 键 词:化学浴沉积法  CdS薄膜  超声波  薄膜太阳能电池
文章编号:1000-0593(2003)04-0625-05
修稿时间:2002年7月2日

Spectrum Analysis of CdS Thin Films Deposited by Chemical Bath Deposition with Ultrasonication
CHU Xiang-qiang,XIE Da-tao,MENG Tie-jun,WANG Li-fang,ZHU Feng,XIANG Rong,QUAN Sheng-wen,ZHAO Kui,CHEN Jia-er Institute of Heavy Ion Physics,School of Physics,Peking University,Beijing ,China.Spectrum Analysis of CdS Thin Films Deposited by Chemical Bath Deposition with Ultrasonication[J].Spectroscopy and Spectral Analysis,2003,23(4):625-629.
Authors:CHU Xiang-qiang  XIE Da-tao  MENG Tie-jun  WANG Li-fang  ZHU Feng  XIANG Rong  QUAN Sheng-wen  ZHAO Kui  CHEN Jia-er Institute of Heavy Ion Physics  School of Physics  Peking University  Beijing  China
Institution:CHU Xiang-qiang,XIE Da-tao,MENG Tie-jun,WANG Li-fang,ZHU Feng,XIANG Rong,QUAN Sheng-wen,ZHAO Kui,CHEN Jia-er Institute of Heavy Ion Physics,School of Physics,Peking University,Beijing 100871,China
Abstract:Ultrasonic agitation was applied during the chemical bath deposition of CdS thin films and a great difference in the growth of CdS thin films was found to be caused by ultrasonication. The thickness of the thin films was measured by Rutherford back-scattering (RBS) and the crystalloid structure was analyzed by X-ray diffraction (XRD). SEM was used to observe the surface morphology of the thin films. The results showed that ultrasonication can effectively improve the quality of the CdS thin films and the films preparated by this method were uniform, compact and well constructed. There were virtually no colloidal particles adsorbed on the surface. X-ray diffraction showed that the preferred orientation changed from hexagonal(002)/cubic(111) to hexagonal(101). At the same time controlling the time of deposition could control the thickness of the films accurately to about 50 nm, which can meet the special need in preparation of thin film solar cells.
Keywords:Chemical bath deposition  CdS thin film  Ultrasonication  Thin film solar cell
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