| 超薄Ag膜的椭偏光谱建模及解谱 |
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| 引用本文： | 曹春斌,蔡琪,宋学萍,孙兆奇.超薄Ag膜的椭偏光谱建模及解谱[J].光谱学与光谱分析,2008,28(5):995-998. |
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| 作者姓名： | 曹春斌 蔡琪 宋学萍 孙兆奇 |
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| 作者单位： | 1. 安徽农业大学理学院,安徽,合肥,230036
2. 安徽大学物理与材料学院,安徽,合肥,230039 |
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| 基金项目： | 国家自然科学基金
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高等学校博士学科点专项科研项目
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安徽省高校自然科学基金
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安徽省人才基金
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安徽大学校科研和教改项目 |
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| 摘 要： | 用直流溅射法制备了6个不同厚度的超薄Ag膜。结合超薄Ag膜的结构特点,采用了Drude模型联合Lorentz Oscillator模型的解谱方法,得到1~6号样品的厚度分别为4.0,6.2,12.5,26.2,30.0和40.6 nm。从拟合结果的消光系数k图谱中发现,在1号到4号样品中分别于430,450,560和570 nm处出现了表面等离子体共振峰(SPR),随膜厚的增加共振峰宽化且峰位红移。最后,利用SPR理论计算出不同厚度Ag薄膜等离子体共振峰出现的位置,并和实验结果进行了比较。
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| 关 键 词： | 超薄Ag膜 椭偏数据解谱 表面等离子体共振吸收 |
| 文章编号： | 1000-0593(2008)05-0995-04 |
| 修稿时间： | 2006年12月8日 |
Model Building and Optimization of Ultrathin Silver Films by Spectroscopic Ellipsometry |
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| CAO Chun-bin,CAI Qi,SONG Xue-ping,SUN Zhao-qi.Model Building and Optimization of Ultrathin Silver Films by Spectroscopic Ellipsometry[J].Spectroscopy and Spectral Analysis,2008,28(5):995-998. |
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| Authors: | CAO Chun-bin CAI Qi SONG Xue-ping SUN Zhao-qi |
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| Institution: | School of Sciences, Anhui Agricultural University, Hefei 230036, China. caochunbin@ahau.edu.cn |
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| Abstract: | Ultrathin silver films(4.0,6.2,12.5,26.2,30.0 and 40.6 nm) were prepared by direct current sputtering deposition.The thicknesses and optical constants of the films were studied by spectroscopic ellipsometry.The Drude model combined with Lorentz Oscillator model was used in the optimization of the ellipsometric data.The results show that surface plasma resonance absorption(SPR) peaks appear in the spectra of extinction coefficient k for samples 1,2,3 and 4.The peak shifts to shorter wavelength with the reduction in film thickness.The wavelengths of the SPR for different films were calculated by the SPR theory and also compared with the experimental data. |
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| Keywords: | Ultrathin silver films Spectroscopic ellipsometry Surface plasma resonance absorption |
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