X射线荧光光谱检测多层薄膜样品的增强效应研究

研究了X射线荧光光谱检测多层薄膜样品的增强效应.根据多层膜中的X荧光强度理论计算公式编写了计算机程序,并计算了Zn/Fe和Fe/Zn双层膜样品中不同薄膜厚度时Fe Kα的一次荧光强度、二次荧光强度、二次荧光与一次荧光强度比以及二次荧光在总荧光强度中比例.研究发现,在多层膜样品的X射线荧光分析中,激发条件不变的情况下,元素谱线的一次荧光相对强度、二次荧光相对强度和二次荧光在总荧光强度中所占比例都随薄膜厚度及位置的变化而变化.当Fe和Zn层厚度相同时,随厚度的变化,对于Fe/Zn样品,Fe Kα二次荧光强度占总荧光强度最高为9%,而对于Zn/Fe样品这一比例最高可达35%.

Study of Enhancement Effects in X-Ray Fluorescence Analysis for Multi-Layer Samples

The enhancement effects in X-ray fluorescence analysis for multi-layer samples were studied. A computer program was developed based on the theoretical equations for X-ray fluorescence intensity calculation and used to calculate the intensities of primary fluorescence and secondary fluorescence, the ratios of intensities of secondary fluorescence to primary fluorescence, and the portions of intensities of secondary fluorescence in total fluorescence for Fe Ka line in Zn/Fe and Fe/Zn film samples. It was found that the intensities of a characteristic line of an element in primary fluorescence and secondary fluorescence, the ratios of intensities of secondary fluorescence to primary fluorescence, and the portions of intensities of secondary fluoresccncc in total flu orescence were dependent not only on the thickness of the films but also on the position of the films in case of constant excitation conditions when multi-layer samples were tested by X-ray fluorescence analysis. When the thickness of Zn layer is thc same as that of Fe layer, the calculated ratio of intensity of secondary fluorescence to total fluorescence of Fe Ka varies with the thickness, and reaches up to 9% for Fe/Zn sample while up to 35% for Zn/Fe sample.