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| 相变前后VO2薄膜光学性质的研究 | |
| 引用本文： | 何琛娟,李德华,卢振中,聂玉昕,王学进,袁宏韬,冯克安.相变前后VO2薄膜光学性质的研究[J].光谱学与光谱分析,2003,23(3):417-420. |
| 作者姓名： | 何琛娟 李德华 卢振中 聂玉昕 王学进 袁宏韬 冯克安 |
| 作者单位： | 1. 中科院物理研究所光物理实验室,北京,100080 2. 中科院物理研究所表面物理实验室,北京,100080 3. 中科院物理研究所表面物理实验室,北京,100080;长春理工大学光学物理系,长春,130022 |
| 摘 要： | 测量了玻璃、熔融石英及蓝宝石衬底上VO2 薄膜变温过程的红外透过率谱 ,对样品相变前后的光学性质进行了研究。特定温度下VO2 薄膜发生相变 ,其光学性质随之发生突变。不同衬底、不同制作工艺影响相变发生的温度以及相变前后光学性质的变化量。蓝宝石衬底上磁控溅射所得的VO2 膜 5 μm处透过率的减小量ΔT为 70 % ,相对变化ΔT TRT为 94 % ,玻璃衬底上磁控溅射所得的VO2 膜 2 5 μm处ΔT =6 4 2 % ,而ΔT TRT高达 98% ,接近于 1。 |
| 关 键 词： | VO2薄膜 相变 光学性质 |
| 文章编号： | 1000-0593(2003)03-0417-04 |
| 修稿时间： | 2003年1月8日 |
Research on Optical Property of Phase Transition VO2 Films |
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| HE Chen-juan,LI De-hua,LU Zhen-zhong,NIE Yu-xin,WANG Xue-jin,YUAN Hong-tao , and FENG Ke-an .Laboratory of Optical Physics.Research on Optical Property of Phase Transition VO2 Films[J].Spectroscopy and Spectral Analysis,2003,23(3):417-420. | |
| Authors: | HE Chen-juan LI De-hua LU Zhen-zhong NIE Yu-xin WANG Xue-jin YUAN Hong-tao and FENG Ke-an Laboratory of Optical Physics |
| Institution: | Laboratory of Optical Physics, Institute of Physics, CAS, Beijing 100080, China. |
| Abstract: | Optical transmission spectra of VO2 films on glass, fused silica, and sapphire were recorded and analyzed during heating process. Thermally induced phase transition of VO2 films occurred at a certain temperature, associated with abrupt changes in optical properties. The transition temperature and the contrast of the optical properties depended on the substrate and the deposit method used. The change in transmittance delta T at 5 microns of VO2 films deposited on sapphire by RF magnetron sputtering was 70%, and the corresponding relative change delta T/TRT was 94%. For the VO2 films deposited on glass by RF magnetron sputtering, delta T at 2.5 microns was 64.2%, and delta T/TRT was as high as 98%. |
| Keywords: | VO 2 films Phase transition Optical properties |
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