现代高分辨拉曼光谱仪的配置及应用研究

拉曼光谱分辨率是关系到从光谱中提取出样品结构信息的关键参数，高分辨拉曼光谱能够提供更多、更精细的样品有关信息。在此全面分析了现代高分辨拉曼光谱仪中决定光谱分辨率的各参数，辨析了易于混淆的分辨率和色散度概念。用理论分析和实验结果说明光栅密度与光谱分辨率的关系以及采用高密度光栅增进光谱分辨率所受到的限制、如何利用长焦长光栅增进光谱分辨率而不损害仪器通光效率、入射狭缝宽度对光谱分辨率及灵敏度的影响，在此基础上如何求得一个合理的平衡选择;并且用不同配置的现代新型拉曼光谱仪实验研究了多层硅结构中的应力分布和单壁碳纳米管管径分布，实验结果清晰地佐证了以上分析，并充分说明了拉曼光谱测量中选择分辨率的重要性。

Study on the Configuration and Applications of High Spectral Resolution Raman Spectrometer

In the present paper the authors studied theoretically and experimentally the relationship between spectral resolution and grating density,the limitations to improve the spectral resolution by using high density grating,the use of longer focal length grating to increase spectral resolution without compromising instrument throughput and the effect of slit width on spectral resolution and sensitivity.Finally,two experiment results were provided to show why higher spectral resolution is important to ensure tha...