| 表面波等离子体沉积类金刚石膜结构的Raman光谱和XPS分析 |
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| 引用本文： | 黄卫东,詹如娟.表面波等离子体沉积类金刚石膜结构的Raman光谱和XPS分析[J].光谱学与光谱分析,2003,23(3):512-514. |
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| 作者姓名： | 黄卫东 詹如娟 |
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| 作者单位： | 中国科学院结构分析开放实验室,中国科学技术大学近代物理系,安徽,合肥,230026 |
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| 基金项目： | 国家自然科学基金重点项目资助 (No. 1 98350 30 ) |
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| 摘 要： | 本文使用Raman光谱和X 射线光电子能谱 (XPS)的分析方法对表面波等离子体沉积的类金刚石(DLC)薄膜的结构进行了研究。采用 4峰的高斯解谱的方法对不同沉积时间的膜的Raman谱进行处理 ,并由此对膜中sp3键的百分含量PD 进行了定量计算 ;同时还采用 3峰的高斯解谱方法对不同沉积时间的膜的光电子能谱进行处理 ,也对膜中sp3键的百分含量进行了计算。两种方法均得到膜中sp3含量在 2 0 %～ 4 0 %之间 ,且随沉积时间的增加而增加。
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| 关 键 词： | 类金刚石 Raman光谱 XPS sp3 |
| 文章编号： | 1000-0593(2003)03-0512-03 |
| 修稿时间： | 2001年6月4日 |
Raman Spectra and XPS Analyses of the Diamond-like Carbon Film Deposited by Surface Wave Plasma |
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| HUANG Wei-dong and ZHAN Ru-juan Structure Research Laboratory,Chinese Academy of Sciences.Raman Spectra and XPS Analyses of the Diamond-like Carbon Film Deposited by Surface Wave Plasma[J].Spectroscopy and Spectral Analysis,2003,23(3):512-514. |
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| Authors: | HUANG Wei-dong and ZHAN Ru-juan Structure Research Laboratory Chinese Academy of Sciences |
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| Institution: | Structure Research Laboratory, Chinese Academy of Sciences, Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China. |
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| Abstract: | Raman spectrum and X-ray photoelectron spectroscopy (XPS) were used for the structural analysis of diamond-like carbon (DLC) film deposited by surface wave plasma. Decomposition methods were used respectively to achieve the quantitative measurement of sp3 content of the films deposited under different working times. We obtained the result that the sp3 bonding of the films was in the range of 20%-40% and increased with the depositing time by using both analysis methods. |
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| Keywords: | Diamond-like carbon Raman spectrum XPS sp3 |
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