紫外增强Lumogen薄膜旋涂法制备及其性能表征

Lumogen薄膜用于固态硅基探测器件CCD紫外增强具有显著的成本和工艺优势。研究旋涂法制备Lumogen薄膜的CCD紫外增强技术，通过对薄膜的光谱分析得到优化的制备工艺。制备的薄膜在可见光波段透过率较高，对紫外波段的光具有较强的吸收，其发射峰位于525 nm，并且激发谱较宽, 涵盖200～400 nm。实验结果表明使用旋涂法制备的紫外增强薄膜，能将紫外光转化为可见光，并且在增强紫外响应的同时，不削弱可见波段的响应，是一种有效增强固态检测器紫外响应的紫外增强薄膜。

Preparation by Spin-Coating Technology and Characterization of UV-Enhanced Lumogen Film

As an effective way to increase the UV response for CCD/CMOS, the advantage of the Lumogen film is the simple process and low cost. In the present paper the Lumogen film was deposited onto fused silica slides by the spin-coating way, which has less damage than PVD physical vacuum deposition) way. The main test and analysis of the thin-film include transmission spectrum, absorption spectrum, and excitation and emission spectrum. It was showed that these coatings were transmitted well in visible region (λ>400 nm), and emitted a yellowish green glow centered at ～525 nm together with a wide excitation spectrum range from 200 to 400 nm. The synthesis shows that Lumogen coatings match accurately with the detected spectrum of conventional silicon-based image sensors, which makes this kind of thin films an ultraviolet responsive coating for sensors.