| Langmuir单探针诊断电子回旋共振等离子体参数分布特性 |
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| 引用本文： | 符斯列,陈俊芳,王春安.Langmuir单探针诊断电子回旋共振等离子体参数分布特性[J].大学物理实验,2009,22(3):27-32. |
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| 作者姓名： | 符斯列 陈俊芳 王春安 |
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| 作者单位： | 1. 华南师范大学,广州,510006
2. 广东技术师范学院,广州,510665 |
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| 基金项目： | 国家自然科学基金项目，教育部高校博士点专项科研项目[20040574008]:广东省自然科学基金重点项目，广州市科技计划项目 |
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| 摘 要： | 本文采用Langmuir单静电探针法,分析诊断了电子回旋共振等离子体的参数分布特性,并分析了微波功率、气压对轴向、径向等离子体空间分布的影响。在微波功率400W~650W范围内等离子体具有较高的密度及良好的径向均匀性。
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| 关 键 词： | 电子回旋共振等离子体 Langmuir单静电探 等离子体分布特性 |
DIAGNOSE OF THE DISTRIBUTION OF ELECTRON CYCLOTRON RESONANCE PLASMA BY SINGLE LANGMUIR PROBE |
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| Fu Silie,Chen Junfang,Wang Chunnan.DIAGNOSE OF THE DISTRIBUTION OF ELECTRON CYCLOTRON RESONANCE PLASMA BY SINGLE LANGMUIR PROBE[J].Physical Experiment of College,2009,22(3):27-32. |
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| Authors: | Fu Silie Chen Junfang Wang Chunnan |
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| Institution: | Fu Silie Chen Junfang (South China Normal University,Guangzhou,510006) Wang Chunan (GuangDong Polytechnic Normal University,510665) |
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| Abstract: | A Langmuir probe was applied to investigate the axial and radial distributions of electron cyclotron resonance plasma.The results show that a saturation tendency of plasma density presents with the increasing of microwave power.Such saturation tendency will be evident at lower gas pressure.In addition,the effect of power increasing on distribution in downstream is minute,but get rise to the improvement of radial uniformity.The proper microwave power is in the range of 400W～650W.High plasma density and fine radial uniformity are satisfied in such power range. |
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| Keywords: | ECR plasma Langmuir single probe plasma distribution diagnose |
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