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超声波辅助酸蚀提高熔石英损伤阈值
引用本文:赵东峰,邬融,林尊琪,邵平,朱健强.超声波辅助酸蚀提高熔石英损伤阈值[J].强激光与粒子束,2015,27(1):012001.
作者姓名:赵东峰  邬融  林尊琪  邵平  朱健强
作者单位:1.中国科学院 上海光学精密机械研究所, 高功率激光物理联合实验室, 上海 201 800;
基金项目:国家专项基金项目(1229211A00)
摘    要:为了提高熔石英元件表面抗激光损伤阈值,利用超声波辅助HF酸研究平滑光学元件表面缺陷形貌和去除刻蚀后残留物效果,通过扫描电子显微镜电镜和原子力显微镜记录表面形貌结构,以及单脉冲激光辐照测试抗损伤阈值确定实验参数。研究表明,超声波场的引入能催化HF酸的刻蚀速率、提高钝化效果并且更易剥离嵌入的亚μm级杂质粒子。经过实验测试,获得了熔石英类元件相匹配的超声辅助HF酸刻蚀实验参数,研究结果对应用超声波辅助HF酸研究熔石英表面抗激光损伤有重要意义。

关 键 词:激光光学    熔石英    超声波    损伤阈值    化学刻蚀
收稿时间:2014/9/19

Acid etching combined with ultrasonic for improving laser damage threshold of fused silica
Zhao Dongfeng , Wu Rong , Lin Zunqi , Shao Ping , Zhu Jianqiang.Acid etching combined with ultrasonic for improving laser damage threshold of fused silica[J].High Power Laser and Particle Beams,2015,27(1):012001.
Authors:Zhao Dongfeng  Wu Rong  Lin Zunqi  Shao Ping  Zhu Jianqiang
Institution:1.National Laboratory on High Power Laser and Physics,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;University of Chinese Academy of Sciences,Beijing 100049,China
Abstract:In order to improve the laser damage resistance of fused silica optical surfaces, the appearance of smoothed fused silica surface defect and the effect of wiping off etching contamination are researched on HF-based etching processes under ultrasonic. And the experimental parameters are determined with SEM microscopy and atomic force microscopy to record face appearance and with one pulse laser incidence to measure laser damage threshold. Results show that it is advantageous to use HF-based etching processes under ultrasonic to smooth the defected surfaces and wipe off micrometer contamination particles. By experimental measurement, the parameters of HF-based etching processes under ultrasonic are obtained for different kinds of fused silica optics. The present research is very important for improving laser damage resistance of fused silica.
Keywords:laser optics  fused silica  ultrasonic  damage threshold  chemical etching
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