| 溶胶-凝胶SiO2薄膜氨热两步后处理 |
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| 引用本文： | 章春来,祖小涛,蒋晓东,袁晓东,王毕艺,宴良宏,张洪亮,徐世珍,田东斌,尹伟,赵松楠,吕海兵.溶胶-凝胶SiO2薄膜氨热两步后处理[J].强激光与粒子束,2008,20(6). |
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| 作者姓名： | 章春来 祖小涛 蒋晓东 袁晓东 王毕艺 宴良宏 张洪亮 徐世珍 田东斌 尹伟 赵松楠 吕海兵 |
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| 作者单位： | 1. 电子科技大学 物理电子学院， 成都 610054； 2. 中国工程物理研究院 激光聚变研究中心， 四川 绵阳 621900 |
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| 基金项目： | 国家高技术研究发展计划(863计划)
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教育部跨世纪优秀人才培养计划 |
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| 摘 要： | 以正硅酸乙酯为前驱体，氨水作催化剂，采用溶胶-凝胶法提拉镀制SiO2双面膜，对薄膜进行氨处理和热处理。采用椭偏仪、分光光度计、红外光谱、扫描探针显微镜、静滴接触角测量仪表征薄膜的特性。研究表明：经氨热两步后处理，膜厚持续减小，折射率经氨处理先增大了0.236,再经热处理又减小了0.202，膜层透光性变好，透过率峰值持续向短波方向移动；经两步后处理的膜面平整度明显变好，与水的接触角先增大到58.92°后减小到38.07°。
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| 关 键 词： | 溶胶-凝胶 二氧化硅薄膜 氨处理 热处理 椭偏仪 |
| 收稿时间： | 1900-01-01; |
SiO2 sol-gel films after ammonia and heat two-step treatments |
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| ZHANG Chun-lai,ZU Xiao-tao,JIANG Xiao-dong,YUAN Xiao-dong,WANG Bi-yi,YAN Liang-hong,ZHANG Hong-liang,XU Shi-zhen,TIAN Dong-bin,YIN Wei,ZHAO Song-nan,L Hai-bing.SiO2 sol-gel films after ammonia and heat two-step treatments[J].High Power Laser and Particle Beams,2008,20(6). |
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| Authors: | ZHANG Chun-lai ZU Xiao-tao JIANG Xiao-dong YUAN Xiao-dong WANG Bi-yi YAN Liang-hong ZHANG Hong-liang XU Shi-zhen TIAN Dong-bin YIN Wei ZHAO Song-nan L Hai-bing |
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| Institution: | 1. School of Physical Electronics, University of Electronic Science and Technology of China, Chengdu 610054, China; 2. Research Center of Laser Fusion, CAEP, P.O. Box 919-988-5, Mianyang 621900, China |
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| Abstract: | SiO2 thin films were deposited using tetraethoxylsilane as precursor, ammonia as catalyst on K9 glass by sol-gel method. These films were post-treated by ammonia and heat. The properties of the coatings were characterized by ellipsometer, UV-vis spectrophotometry, FTIR-spectroscopy, scanning probe microscope and contact angle measurement apparatus. The results indicate that the thickness of the films with ammonia and heat treatment tend to decrease. Both the refractive index and water contact angle increase after ammonia treatment. However, they both decrease after heat treatment. The former increases by 0.236 for the first step, then decreases by 0.202 for the second. The latter increases to 58.92°, then decreases to 38.07°. The transmittance of the coatings turn to be better and contin |
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| Keywords: | SiO2 film Ammonia treatment Heat treatment Ellipsometer |
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