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两种反射膜系的激光热力损伤特性
引用本文:陈发良,胡鹏.两种反射膜系的激光热力损伤特性[J].强激光与粒子束,2005,17(11):1610-1616.
作者姓名:陈发良  胡鹏
作者单位:北京应用物理与计算数学研究所, 北京 100088
基金项目:中国工程物理研究院基金资助课题(20030439);国家863计划项目资助课题
摘    要: 在驻波场理论基础上,用表面和界面强吸收理论模型,计算出了激光辐照下两种不同反射膜系中温度场的“多峰”分布特性,分析了激光对薄膜的热力损伤特性、主要破坏模式和阈值条件。结果表明,光学薄膜对激光能量的吸收,主要由驻波场分布及膜层的消光系数决定;膜系表面的杂质吸附层和界面吸收层是膜系的主要能量沉积区,从而在这些界面形成温度场的“多峰”分布,界面因此成为最容易受激光损伤的部分。导致光学薄膜激光损伤的主要模式为膜层熔融和脱落两种。如果膜层中含有杂质,则容易诱导杂质处膜层剥落破坏。

关 键 词:激光损伤  反射膜  驻波  损伤模式
文章编号:1001-4322(2005)11-1610-07
收稿时间:2005-07-02
修稿时间:2005-10-08

Thermal and mechanical damage characteristics of two reflective multilayer films under laser irradiation
CHEN Fa-liang,HU Peng.Thermal and mechanical damage characteristics of two reflective multilayer films under laser irradiation[J].High Power Laser and Particle Beams,2005,17(11):1610-1616.
Authors:CHEN Fa-liang  HU Peng
Institution:Institute of Applied Physics and Computational Mathematics, P.O.Box 8009-11, Beijing 100088, China
Abstract:Based on the standing-wave theory, a theoretical model with high energy absorption at the surface and interfaces is employed to describe laser-induced damages to optical multilayer films. The temperature distributions in two types of reflective multilayer films are calculated, and the characteristics, modes and damage thresholds are analyzed. The results show that energy absorption is mainly determined by the distribution of the standing-wave and extinction coefficients of the material. Multi-peaks over the temperature profiles are found at the surface and interfaces, where the optical multilayer films are prone to damage. Melting and falling off are two main kinds of damage mode, while inclusion, if present, may cause spallation of the layers.
Keywords:Laser damage  Reflective multilayer film  Standing wave  Damage mode
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