| 高折射率光学薄膜的化学法制备研究 |
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| 引用本文： | 沈军,张勤远,杨天河,王珏,周斌,邓忠生,陈玲燕.高折射率光学薄膜的化学法制备研究[J].强激光与粒子束,1999,11(5):609-612. |
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| 作者姓名： | 沈军 张勤远 杨天河 王珏 周斌 邓忠生 陈玲燕 |
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| 作者单位： | 同济大学玻耳固体物理研究所 上海 200092 |
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| 基金项目： | 国家自然科学基金，国家863惯性约束聚变领域及青年科学基金 |
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| 摘 要： | 报道了一种以ZrOC12·8H2O为源，溶胶-凝胶法制备高激光负载高折射率薄膜的新方法。薄膜采用旋转镀膜法制备，对薄膜的结构、光学特性及激光损伤阈值进行了测量，有机粘接剂对薄膜折射率及机械强度的影响也作了探讨。以该薄膜与SiO2溶胶凝胶膜交替涂覆制成的多层高反膜，剩余透过率仅0.98%，激光损伤阈值达16J/cm2（3ns）。
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| 关 键 词： | 水热法 溶胶 高折射率 薄膜 |
| 收稿时间： | 1900-01-01; |
PREPARATION OF OPTIC FILM WITH HIGH REFRACTIVE INDEX BY CHEMICAL METHODS |
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| SHEN Jun,ZHANG Qin-yuan,YANG Tian-he,WANG Jue,ZHOU Bin,DENG Zhong-sheng,CHEN Ling-yan.PREPARATION OF OPTIC FILM WITH HIGH REFRACTIVE INDEX BY CHEMICAL METHODS[J].High Power Laser and Particle Beams,1999,11(5):609-612. |
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| Authors: | SHEN Jun ZHANG Qin-yuan YANG Tian-he WANG Jue ZHOU Bin DENG Zhong-sheng CHEN Ling-yan |
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| Abstract: | Optic thin film with high refractive index and high laser damage threshold was preparedfrom ZrOC12. SH2O with sol-gel process. The film was prepared with spin coating method. The structure,optical properties and laser damage threshold of the films were investigated. The influences of organic binderto the refractive index and the mechanic strength of the films were also studied. A minimum transmittance ofless than 1% near 1064urn was obtained from the present SiO2/ZrO2]10-multilayer HR coatings, meanwhilea laser damage threshold of more than 16J/cm' was achieved using high power laser at wavelength of 1064urnand pulse width of 2.5ns. |
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| Keywords: | hydrothermal synthesis soi high refractive index film |
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