软X射线激光用自支撑Zr滤光膜的制备及测量

 利用直流磁控溅射方法制备了质量厚度为200 μg·cm^-2，直径为20 mm的自支撑金属Zr滤光膜。用同步辐射光源和紫外可见分光光度计分别测量了滤光膜在软X射线和可见光波段的透射率，用俄歇电子能谱（AES）分析了膜中的元素含量。结果表明:Zr膜在13.9 nm波长的透射率达19%， 对可见光的抑制性能达43 dB。杂质、膜层氧化及表面污染是影响滤光膜软X射线光谱透射率的主要因素。

Preparation and research of free-standing Zr filter for soft X-ray laser

200 μg/cm2 free-standing Zr filters of 20 mm in diameter were made by DC magnetron sputtering. Soft X-ray spectral transmittance of the filters was measured in the National Synchrotron Radiation Laboratory, and the light blocking performance was tested by spectrophotometer. The elements in Zr filters were analyzed using Auger Electron Spectroscopy. The results indicate that Zr filters have good transmittance(19%) at 13.9 nm and perfect visible light blocking properties(43 dB), N，O arisen from background pressure, oxidation and surface contamination are the major species that affect the transmittance of Zr films in the soft X-ray．