| 多层介质膜光栅激光预处理 |
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| 引用本文： | 高鹏鹏,晋云霞,刘世杰,汪剑鹏,陈顺利.多层介质膜光栅激光预处理[J].强激光与粒子束,2011,23(10). |
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| 作者姓名： | 高鹏鹏 晋云霞 刘世杰 汪剑鹏 陈顺利 |
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| 作者单位： | 1. 中国科学院 上海光学精密机械研究所 强激光材料重点实验室, 上海 201800;2. 中国科学院 研究生院, 北京 100049 |
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| 基金项目： | Supported by National Natural Science Foundation of China(10704079) |
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| 摘 要： | 在N-on-1测试模式下研究了多层介质膜光栅的激光预处理效应。实验发现，激光预处理之后多层介质光栅膜的阈值能提高到处理前阈值的1.5~2.0倍。预处理机制可能是低能量密度激光辐照减少了光栅表面的污染物并降低了光栅表面的粗糙度。激光预处理可以作为优化光栅结构、酸洗等一系列提高多层介质膜光栅阈值方法的一个补充。
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| 关 键 词： | 激光诱导损伤 多层介质膜光栅 激光预处理 抗激光损伤性 精密结构 |
| 收稿时间： | 1900-01-01; |
Laser-conditioning on multilayer dielectric gratings |
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| Gao Pengpeng,Jin Yunxia,Liu Shijie,Wang Jianpeng,Chen Shunli.Laser-conditioning on multilayer dielectric gratings[J].High Power Laser and Particle Beams,2011,23(10). |
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| Authors: | Gao Pengpeng Jin Yunxia Liu Shijie Wang Jianpeng Chen Shunli |
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| Institution: | (1. Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China; 2. Graduate University of Chinese Academy of Sciences, Beijing 100049, China) |
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| Abstract: | Laser-conditioning on multilayer dielectric gratings(MDGs) is investigated with the standard N-on-1 test method.It is found that the laser induced damage threshold(LIDT) of MDGs is increased up to 2.0 times the value without laser-conditioning.The possible physical mechanism can be explained by the reduction of contamination and surface roughness in the grating region under the irradiation of laser with low energy.In addition to the existing methods such as grating structure optimization and acid-cleaning,l... |
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| Keywords: | laser induced damage multilayer dielectric gratings laser-conditioning damage resistance fine structure |
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