| 基于NOA73微球与SU-8微柱的微探针制作 |
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| 引用本文： | 王伟,贾志浩,段俊萍,崔建利,徐苏坪,张斌珍.基于NOA73微球与SU-8微柱的微探针制作[J].强激光与粒子束,2015,27(2):024103. |
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| 作者姓名： | 王伟 贾志浩 段俊萍 崔建利 徐苏坪 张斌珍 |
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| 作者单位： | 1.中北大学 电子测试技术重点实验室, 太原 030051 ; |
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| 摘 要： | 集成紫外固化胶NOA73微球与SU-8微柱制造的亚毫米探针,可以作为关键部件应用于三坐标测量机。NOA73微球通过NOA73对其他溶液的界面张力形成,柱子由深紫外光穿过微球曝光SU-8形成。这种新技术利用甘油补偿NOA73与空气折射率差,使得紫外光透过NOA73微球后保持接近平行。最终得到高深宽比的探针结构,高度超过1 200 m,微柱侧壁与基底呈89。
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| 关 键 词： | 探针 坐标测量机 折射率补偿 微机电系统 |
| 收稿时间： | 2014-09-14 |
Fabrication of microprobe based on NOA73 and SU-8 |
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| Institution: | 1.Science and Technology on Electronic Test &Measurement Laboratory,North University of China,Taiyuan 030051,China;2.Key Laboratory of Instrumentation Science &Dynamic Measurement,North University of China,Ministry of Education,Taiyuan 030051,China |
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| Abstract: | Fabrication of microprobe integrated with a UV-curable adhesive, NOA73 microspheres and SU-8 micro pillars is presented, which can be applied to coordinate measurement machine (CMM) as a key component. The NOA73 microsphere is formed by the interfacial tension between NOA73 and other solution, the pillar is formed from SU-8 deep ultraviolet lithography. The glycerol is coated for compensating the refractive index difference between NOA73 and air, thus UV light still keep parallel, after propagating through the NOA73 microspheres. The high aspect ratio microprobe is obtained with the height above 1 200 m and the angle between micro-pillar and substrate is 89. |
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