电共轭流体微型泵的实验研究

为了解决MEMS技术制备具有超厚、高深宽比电极结构的射流发生器中三角柱电极尖端部分出现的弧形缺陷以及脱模时缝隙电极易脱落等问题，提高射流发生器的制作质量以及电共轭流体微型泵的输出性能。结合理论分析与反复试验提出了一系列改进措施:优化涂胶、热处理、显影等工艺的参数以及缝隙电极的形状，采用新型KMPR光刻胶去除方法等。通过应用上述方法获得的射流发生器中，三角柱电极-缝隙电极对厚度约500 m，深宽比高，三角柱电极尖端结构完整，缝隙电极附着率有很大提高。同时，利用制备的射流发生器，设计、装配了电共轭流体微型泵的样机。

MEMS based electro-conjugate fluid micropump

In order to overcome the deficiency in the fabrication of triangular prism slit (TPS) electrode pairs with ultrathick and high aspect ratio, to obtain a jet generator with good appearance and in that way improve the output performance of electro-conjugate fluid (ECF) micropump, several optimization measures for the fabrication of TPS electrode pairs based on MEMS technology are proposed. By repeating experiment and improvement based on theoretical analysis, structural optimization of slit electrode, optimized process parameter for spin coating, heat treatment, development and a novel removal method for KMPR negative photoresists are utilized. Finally, the jet generator with thickness of almost 500 m and high aspect ratio of TPS electrode pairs are fabricated successfully. The tip of triangular prism electrode has unbroken structure and the slit electrode attaches to the conductor layer well. Moreover, a prototype of ECF micropump is designed and assembled for next experimental study.