| 酸碱分步催化对溶胶-凝胶ZrO2膜光学性能的影响 |
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| 引用本文： | 赵松楠,吕海兵,晏良宏,王韬,王海军,袁晓东,郑万国.酸碱分步催化对溶胶-凝胶ZrO2膜光学性能的影响[J].强激光与粒子束,2009,21(8). |
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| 作者姓名： | 赵松楠 吕海兵 晏良宏 王韬 王海军 袁晓东 郑万国 |
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| 作者单位： | 中国工程物理研究院 激光聚变研究中心， 四川 绵阳 621900 |
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| 基金项目： | 国家高技术发展计划项目 |
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| 摘 要： | 以丙醇锆作为前驱体，利用酸碱分步催化法制备了ZrO2溶胶，用粒度仪检测胶体粒度；用N2吸脱附表征凝胶的结构；采用旋转镀膜法在K9基片上镀制单层ZrO2薄膜；用分光光度计和椭偏仪检测膜层的透过率、折射率及膜层厚度；用红外光谱仪检测胶体内部粒子间化学键状态。实验结果发现,在脉宽1 nm，波长1 064 nm时，采用此种胶体镀制的单层ZrO2膜层折射率达到1.74，单层膜损伤阈值为9.0 J/cm2,表明该方法集中了酸与碱两种催化方式的优点，一定程度上提高了膜层的光学性能。
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| 关 键 词： | 溶胶-凝胶 ZrO2 催化剂 折射率 胶体粒子 |
| 收稿时间： | 1900-01-01; |
Optical characterization of sol-gel ZrO2 coatings with acid alkali two-step method |
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| Zhao Songnan,Lü Haibing,Yan Lianghong,Wang Tao,Wang Haijun,Yuan Xiaodong,Zheng Wanguo.Optical characterization of sol-gel ZrO2 coatings with acid alkali two-step method[J].High Power Laser and Particle Beams,2009,21(8). |
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| Authors: | Zhao Songnan Lü Haibing Yan Lianghong Wang Tao Wang Haijun Yuan Xiaodong Zheng Wanguo |
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| Institution: | Research Center of Laser Fusion， CAEP， P. O. Box 919-988, Mianyang 621900, China |
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| Abstract: | A synthesis procedure of ZrO2 colloids derived from the acid-alkali two-step catalyzed hydrolysis was disclosed. The granularity and its distribution of the colloid particles were measured.Then a ZrO2 film was prepared by the spin-coating method on K9 glass. Physical properties of the thin film were characterized by ellipsometer, UV-Vis spectrophotometer, and Fourier transform infrared spectrometer. The refractive index of the coating with the two-step method was 1.74, and the laser damage threshold was 9.0 J/cm2 at 1 064 nm fundametal wavelength and 1 ns pulse duration.The measured and experimental results indicate that the two-step method have advantages over single step ones. |
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| Keywords: | ZrO2 |
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