| 微加工薄膜变形镜特性分析 |
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| 引用本文： | 李恩德,段海峰,戴云,蒋鹏,张雨东.微加工薄膜变形镜特性分析[J].强激光与粒子束,2006,18(7):1099-1103. |
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| 作者姓名： | 李恩德 段海峰 戴云 蒋鹏 张雨东 |
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| 作者单位： | 1.中国科学院 光电技术研究所, 成都 610209; 2.中国科学院 研究生院, 北京 100080 |
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| 基金项目： | 中国科学院所长基金;中国科学院资助项目 |
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| 摘 要： | 借助测量微加工薄膜变形镜驱动器的面形影响函数，分析了驱动器的电压-位移函数和驱动器之间的线性叠加性;通过对连续面形变形镜拟合像差的理论分析和实验研究，建立了微加工薄膜变形镜电压解耦模型。分析了对前36阶Zernike模式的拟合残差和拟合能力，指出微加工薄膜变形镜仅可用来拟合低级像差并且有较大的拟合能力和较小的拟合残差，而不能拟合高级像差。
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| 关 键 词： | 自适应光学 微加工薄膜变形镜 拟合能力 干涉仪 |
| 文章编号： | 1001-4322(2006)07-1099-05 |
| 收稿时间： | 2005-07-22 |
| 修稿时间： | 2006-02-24 |
Analysis of characteristics of micromachined membrane deformable mirror |
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| LI En-de,DUAN Hai-feng,DAI Yun,JIANG Peng,ZHANG Yu-dong.Analysis of characteristics of micromachined membrane deformable mirror[J].High Power Laser and Particle Beams,2006,18(7):1099-1103. |
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| Authors: | LI En-de DUAN Hai-feng DAI Yun JIANG Peng ZHANG Yu-dong |
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| Institution: | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, P.O.Box 350, Chengdu 610209, China;2. Graduate University of Chinese Academy of Sciences, Beijing 100080, China |
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| Abstract: | The function between voltage and displacement of actuator and the linear superposing of the actuators for micromachined membrane deformable mirror are analyzed by means of the measured influence function of actuators.The voltage decoupling model for micromachined membrane deformable mirror is established through theoretical and experimental analysis of the fitting aberration of a continuous-surface deformable mirror.The fitting of the former 10-order Zernike mode is carried out.Analyzing the residual fitting error and correction capacity to the former 36-order Zernike mode,the conclusion is that micromachined membrane deformable mirror can be applied to correct the low order aberrations(especially for the former 10-order Zernike mode,with which it has a larger correcting capacity and a less residual fitting error) but not the high order one. |
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| Keywords: | Adaptive optics Mciomachined membrane deformable mirror Fitting capacity Interferometer |
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