准动态柱腔充气靶制备工艺研究

主要研究了聚酰胺酸的合成和成膜，聚酰亚胺的热环化，柱腔充气靶的组装和检测，柱腔充气系统的研制，靶场装配和测量，采用准动态充气方式的充气工艺等。研究表明，在二胺和二酐按摩尔比1.01∶1~1.02∶1，反应温度0~5 ℃，反应时间2~3 h条件下，可以制备出厚度0.2~1.0 μm的聚酰亚胺薄膜；薄膜表面光洁度达0.3～0.4 nm，厚度起伏小于5％，薄膜厚度均匀性和表面光洁度都能满足充气靶端口膜的需要，可承受0.1 MPa的压力差；利用柱腔充气系统，可以实现打靶现场配气与充气，并准确控制和测量靶内的气压，测量的误差小于0.1%。

Fabrication of the hohlraum gas-filled target connected with gas source

Filling gas on the spot is widely used to fabricate the hohlraum gas-filled target. This paper focuses on the synthesis of the polypyromellitamic acid, preparation of polyimide film by the method of spin coating and gas-filled targets assemblage. Two key issues here are the preparation of synthetic polypyromellitamic acid and the examination of leakage in vacuum. The gas pressure can be read by transducer connected with the target through the gas tube. Under suitable condition the polyimide film can be made with thickness of 0.2~1.0 μm. The film finish is about 0.3~0.4 nm and the pressure error inside the target is less than 0.1%.