| 一种校正相位测量轮廓术量化误差的算法 |
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| 引用本文： | 赵静,吴炜,郑晓军,刘凯.一种校正相位测量轮廓术量化误差的算法[J].强激光与粒子束,2014,26(11):111005. |
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| 作者姓名： | 赵静 吴炜 郑晓军 刘凯 |
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| 作者单位： | 1.四川大学 电气信息学院, 成都 61 0064; |
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| 基金项目： | 国家自然科学基金项目，四川省科技厅支撑项目，四川大学引进人才科研启动经费资助项目 |
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| 摘 要： | 为了减小相位测量轮廓术中因数字化设备内部结构的量化处理过程引起的相位量化误差,提高相位测量精度。针对相位测量精度要求较高且表面凹凸变化不大的被扫描物体提出了一种能够有效校正相位测量轮廓术量化误差的算法,测量相位中的每一个像素点利用其相邻像素点进行校正。实验结果显示,校正之后,相位量化误差标准差减小了41.38%,相位测量的精度得到了提高。
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| 关 键 词： | 相位测量轮廓术 量化 相位量化误差 误差校正 相邻像素点 |
| 收稿时间： | 2014-05-15 |
Algorithm for correcting quantization error in phase measuring profilometry |
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| Zhao Jing,Wu Wei,Zheng Xiaojun,Liu Kai.Algorithm for correcting quantization error in phase measuring profilometry[J].High Power Laser and Particle Beams,2014,26(11):111005. |
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| Authors: | Zhao Jing Wu Wei Zheng Xiaojun Liu Kai |
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| Institution: | 1.School of Electrical Engineering and Information,Sichuan University,Chengdu 610064,China;2.College of Electronics and Information Engineering,Sichuan University,Chengdu 610064,China;3.Sichuan Institute of Quality Supervision and Inspection,Chengdu 610100,China |
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| Abstract: | In order to decrease the quantization effect caused by quantization process of digital devices, we propose a method to reduce the quantization error for phase measuring profilometry (PMP). The proposed method is suitable for the measurement of high precision and the surface has little change in bump. Each pixel of the calculated phase can be corrected according to neighborhood pixels. The experiment result shows that the standard deviation of phase quantization error decreases 41.38% after correction. The accuracy of phase measurement is improved. |
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| Keywords: | phase measuring profilometry quantization phase quantization error error correction neighborhood pixels |
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