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α-C∶H膜化学结构对光学性能的影响
引用本文:刘兴华,吴卫东,何智兵,张宝玲,王红斌,蔡从中.α-C∶H膜化学结构对光学性能的影响[J].强激光与粒子束,2009,21(3).
作者姓名:刘兴华  吴卫东  何智兵  张宝玲  王红斌  蔡从中
作者单位:1. 重庆大学 输配电装备及系统安全与新技术国家重点实验室, 重庆 400044;2. 中国工程物理研究院 激光聚变研究中心, 四川 绵阳 621900;3. 重庆大学 数理学院, 重庆 400044
摘    要: 选用体积分数为99.999 9%的H2及反式-2-丁烯(T2B)为工作气体,利用低压等离子体增强化学气相沉积法制备了α-C∶H薄膜。利用傅里叶变换红外光谱仪和X射线光电子能谱对薄膜化学键和电子结构进行分析,并结合高斯分峰拟合分析了薄膜中sp3/sp2杂化键比值和sp3C杂化键分数。结果表明:薄膜中氢含量较高,主要以sp3C—H形式存在;工作气压越高,制备的薄膜中C=C键含量越少,薄膜中sp3/sp2杂化键比值和sp3C杂化键分数增加,薄膜稳定性提高。应用UV-VIS光谱仪,获得了波长在400~1 000 nm范围内薄膜的光吸收特性,结果显示: α-C∶H薄膜透过率可达98%。光学常数公式计算得到工作压强为4~14 Pa时光学带隙在2.66~2.76之间,并均随着工作气压的升高而增大。结果表明,随工作气压的升高,薄膜内sp3键减小,从而促使透过率、光学带隙增大。

关 键 词:α-C∶H薄膜  化学键  透过率  光学带隙  低压等离子体增强化学气相沉积法
收稿时间:1900-01-01;

Influence of chemical structure of α-C∶H films on optics property
liu xinghua,wu weidong,he zhibing,zhang baoling,wang hongbin,cai congzhong.Influence of chemical structure of α-C∶H films on optics property[J].High Power Laser and Particle Beams,2009,21(3).
Authors:liu xinghua    wu weidong  he zhibing  zhang baoling  wang hongbin  cai congzhong
Institution:  1. State Key Laboratory of Power Transmission Equipment and System Security and NewTechnology, Chongqing University, Chongqing 400044, China;2. Research Center of Laser Fusion , CAEP, P.O.Box 919-987, Mianyang 621900, China;3. College of Mathematics and Physics, Chongqing University, Chongqing 400044, China
Abstract:α-C∶H thin films were deposited by low-pressure plasma chemical vapor deposition(LPPCVD) with H2 (99.999 9%) and Trans-2-butene as source gases. The chemical bonds and electronic structure are analyzed by using FTIR and XPS. The ratio of sp3/sp2 and the percentage of sp3 C are also analyzed by using the fitting of Gaussian peak fitting. The results show that the chemical structure and composition of the films change with the pressure, and this films mainly contain sp3C—H bond, which have low pressure and possess less C=C bonds. When the pressure increases, the sp3/sp2 hybrid ratios and the percentage of sp3 bonds increase. The optical properties of a-C∶H films are investigated by UV-VIS spectrum in the range of 400~1 100 nm. The transmission ratios can reach 98% in the visible light
Keywords:chemical bonds  transmittance  optical band gap  LPPCVD
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