光学薄膜鲁棒设计中膜系误差灵敏度控制

提出了一种基于膜系误差灵敏度控制的鲁棒膜系设计方法，建立了鲁棒膜系设计评价函数在膜层参数误差统计分布下的解析表达式，避免统计样本数目有限性造成的样本均值与总体期望的误差，以及过大数目样本造成的长的计算时间消耗，并通过宽带增透膜、中性分光膜和线性透射率滤光片等多种薄膜的鲁棒设计实验证实了其在膜层参数误差控制上的效果。结果表明:该新型鲁棒膜系设计方法具有内在的快速算法特性，其设计膜系对镀膜中的膜厚监控误差不敏感，对于高质量薄膜的重复制备和批量成品率的提高具有实用价值。

Application of thin film errors sensitivity control concept to robust design of multilayer optical coatings

A robust design method of multilayer optical coatings based on optimal control of thin-film errors sensitivity is presented in this paper. An analytical calculation model of robust design merit function under statistic layer parameters’ errors is established. It can avoid the computation errors of robust design merit function caused by limited number of layer parameters’ errors simulation sample, and can avoid the long time consumption when large number of layer parameters’ errors simulation samples is used. The effectiveness of the robust design method in thin film errors tolerance control is demonstrated by application to a variety of optical coatings, such as the broadband antireflection coating, neutral beam splitter and linear ramp transmittance filter. Results show that the robust design method owns an inherent fast computation characteristic and the designed film is insensitive to the monitoring thickness errors in deposition process. This method is of practical significance to improving the mass production yields and repetitive production of high quality optical coatings.