高频脉冲功率源初级单元的设计

针对半导体断路开关型、数十kHz高频脉冲功率源设计了初级单元。该单元在低频电路的基础上进行了改进和优化，放电主开关采用IGBT串并联组件，解决了同步触发问题，增加了过流保护系统，设计了高频脉冲触发器。研究发现，初级单元的放电电容放电后有残余电压存在，这会降低脉冲功率源的输出稳定性。该初级电路加强了高频率脉冲功率源的稳定性和可靠性，成功应用于数十kHz高频脉冲功率源。从波形上看，初级充电电源工作电压约为1 kV，放电电流约1.5 kA，在10 kHz条件下可以稳定工作。

Design of primary unit of high repetition frequency pulsed power generator

A primary unit was designed for high-repetition-frequency pulsed power generators based on semiconductor opening switches at tens of kHz. The low frequency circuit in the primary unit was optimized, including that the series and parallel modules of IGBT were adopted as discharge switches, the high frequency synchronized trigger generator was used to control operation of IGBTs, and the current feedback circuit was added. The experimental results indicate that residual voltage of the discharge capacitor after discharging of the primary unit could impact the output stability of the pulse generator, and such primary unit reinforces the stability and reliability of the developed high-frequency pulsed power generator at tens of kHz. According to experimental waveforms, the operating voltage is 1 kV and current is 1.5 kA, the primary unit could operate stably at 10 kHz.