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整形飞秒激光金属材料精细加工
引用本文:胡湛,齐莹,杨鼎,周胜鹏,石英,田蕾,王钦鑫,丁大军.整形飞秒激光金属材料精细加工[J].强激光与粒子束,2012,24(10):2381-2385.
作者姓名:胡湛  齐莹  杨鼎  周胜鹏  石英  田蕾  王钦鑫  丁大军
作者单位:1.吉林大学 原子与分子物理研究所, 长春 1 3001 2
基金项目:国家自然科学基金项目(10974070)
摘    要:实验通过二极管记录透射光信号随脉冲个数变化关系以及观测样品烧蚀形貌来研究不同实验条件对激光烧蚀的影响。使用的样品是厚度为50 m铝箔。实验中通过研究不同变量:激光焦点与样品的相对位置、激光的能量、背景气体压强以及脉冲形状对烧蚀加工过程和结果的影响,从而获得较好烧蚀效果的条件,达到控制烧蚀加工过程的目的。特别是通过使用不同形状的脉冲和具有一定规律的脉冲序列对样品进行烧蚀,发现某些形状的整形脉冲烧蚀结果明显优于变换极限脉冲。说明脉冲整形作为一种新的技术可以在激光精细钻孔领域得到更深入的研究和应用。

关 键 词:整形脉冲    烧蚀    激光能量    气体压强    激光焦点位置
收稿时间:2012/5/22

Metal micromachining with shaped femtosecond laser pulses
Hu Zhan , Qi Ying , Yang Ding , Zhou Shengpeng , Shi Ying , Tian Lei , Wang Qinxin , Ding Dajun.Metal micromachining with shaped femtosecond laser pulses[J].High Power Laser and Particle Beams,2012,24(10):2381-2385.
Authors:Hu Zhan  Qi Ying  Yang Ding  Zhou Shengpeng  Shi Ying  Tian Lei  Wang Qinxin  Ding Dajun
Institution:1.Institute of Atomic and Molecular Physics,Jilin University,Changchun 130012,China
Abstract:This paper studies the ablation result of Aluminum foil (50 μm thickness) under various conditions by observing the morphology of ablation caves and by analyzing the relationship between photodiode signal of transmitted light and the number of pulses to penetration. In order to obtain better condition of ablation, several variable quantities in the experiment are tested, they are pulse energy, position of laser focus relative to sample surface, ambient pressure and the shape of pulse. Preferable results can be obtained by using some specific shaped pulses to ablate sample, compared to those obtained with TL pulse, which means laser pulse shaping technology can be of important usage and application in micromachining of metal material.
Keywords:shaped pulse  ablation  laser energy  ambient pressure  focus position
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