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静电放电引起2SC3356潜在失效的研究
引用本文:祁树锋,刘尚合,刘红兵,杨洁.静电放电引起2SC3356潜在失效的研究[J].强激光与粒子束,2007,19(4):638-642.
作者姓名:祁树锋  刘尚合  刘红兵  杨洁
作者单位:1. 军械工程学院 静电与电磁防护研究所, 石家庄 050003;2. 中国电子科技集团 第13研究所, 石家庄 050051
摘    要: 研究了低电压的人体模型(HBM)静电放电(ESD)对微电子器件造成的潜在失效。分别从CB结和EB结对2SC3356晶体管施加低电压HBM的ESD应力,结果表明:从CB结施加低电压的ESD电应力,所产生的潜在失效的几率要高于从EB结施加低电压的ESD电应力产生的潜在失效几率,即CB结比EB结对低电压的ESD应力引入的潜在失效更为敏感。高温(≥125 ℃)寿命实验有退火效应,从而缓解了低电压的ESD应力使器件产生的潜在损伤,使静电放电过程中引入的潜在损伤自恢复。

关 键 词:静电放电  微电子器件  潜在失效  2SC3356晶体管
文章编号:1001-4322(2007)04-0638-05
收稿时间:2006/4/10
修稿时间:2006-04-10

Latent failure of 2SC3356 caused by electrostatic discharge
QI Shu-feng,LIU Shang-he,LIU Hong-bing,YANG Jie.Latent failure of 2SC3356 caused by electrostatic discharge[J].High Power Laser and Particle Beams,2007,19(4):638-642.
Authors:QI Shu-feng  LIU Shang-he  LIU Hong-bing  YANG Jie
Institution:1. Electrostatic and Electromagnetic Protection Research Institute, Shijiazhuang Ordnance Engineering College, Shijiazhuang 050003, China;2. The 13th Research Institute of China Electronincs Technology Group Coperation, Shijiazhuang 050051, China
Abstract:Latent failure study on the low-level human body model(HBM) electrostatic discharge(ESD) stresses on microelectric device was presented. The low-level ESD stresses were imposed on microwave low noise transistor 2SC3356 using the HBM from CB (collector-base) junctions and EB (emitter-base) junctions. It is shown that the CB junctions are more sensitive than the EB junctions, of the latent failure on 2SC3356 caused by low-level ESD and that high temperature (≥125 ℃) life tests bring about annealing effects and relief the latent defects caused by low-level ESD stresses.
Keywords:Electrostatic discharge  Microelectric device  Latent failure
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